JPS61223179A - 炭素層間化合物の合成法 - Google Patents

炭素層間化合物の合成法

Info

Publication number
JPS61223179A
JPS61223179A JP60064572A JP6457285A JPS61223179A JP S61223179 A JPS61223179 A JP S61223179A JP 60064572 A JP60064572 A JP 60064572A JP 6457285 A JP6457285 A JP 6457285A JP S61223179 A JPS61223179 A JP S61223179A
Authority
JP
Japan
Prior art keywords
carbon
graphite
layers
synthesizing
carbon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60064572A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413425B2 (enrdf_load_stackoverflow
Inventor
Shigeo Nakajima
中島　重夫
Yoshikazu Yoshimoto
好本　芳和
Tomonari Suzuki
鈴木　友成
Yoshiyuki Tougaki
良之 東垣
Toshio Inoguchi
猪口　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP60064572A priority Critical patent/JPS61223179A/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to DE8686103833T priority patent/DE3678030D1/de
Priority to EP86103833A priority patent/EP0201696B1/en
Priority to EP88113145A priority patent/EP0305790B1/en
Priority to DE8888113145T priority patent/DE3687529T2/de
Publication of JPS61223179A publication Critical patent/JPS61223179A/ja
Priority to US07/190,353 priority patent/US4946370A/en
Priority to US07/344,961 priority patent/US5049409A/en
Priority to US07/706,006 priority patent/US5273778A/en
Publication of JPH0413425B2 publication Critical patent/JPH0413425B2/ja
Priority to US08/051,441 priority patent/US5404837A/en
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229—Composition of the substrate
    • C23C18/1245—Inorganic substrates other than metallic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP60064572A 1985-03-20 1985-03-26 炭素層間化合物の合成法 Granted JPS61223179A (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP60064572A JPS61223179A (ja) 1985-03-26 1985-03-26 炭素層間化合物の合成法
DE8686103833T DE3678030D1 (de) 1985-03-20 1986-03-20 Herstellung von kohlenstoffschichten.
EP86103833A EP0201696B1 (en) 1985-03-20 1986-03-20 Production of carbon films
EP88113145A EP0305790B1 (en) 1985-03-20 1986-03-20 Production of graphite intercalation compound and doped carbon films
DE8888113145T DE3687529T2 (de) 1985-03-20 1986-03-20 Herstellung von graphiteinlagerungsverbindung und gedopte carbonfilme.
US07/190,353 US4946370A (en) 1985-03-20 1988-05-05 Method for the production of carbon films having an oriented graphite structure
US07/344,961 US5049409A (en) 1985-03-20 1989-04-28 Method for metal or metal compounds inserted between adjacent graphite layers
US07/706,006 US5273778A (en) 1985-03-20 1991-05-28 Method for producing graphite intercalation compound
US08/051,441 US5404837A (en) 1985-03-20 1993-04-22 Method for preparing a graphite intercalation compound having a metal or metal compounds inserted between adjacent graphite layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60064572A JPS61223179A (ja) 1985-03-26 1985-03-26 炭素層間化合物の合成法

Publications (2)

Publication Number Publication Date
JPS61223179A true JPS61223179A (ja) 1986-10-03
JPH0413425B2 JPH0413425B2 (enrdf_load_stackoverflow) 1992-03-09

Family

ID=13262071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60064572A Granted JPS61223179A (ja) 1985-03-20 1985-03-26 炭素層間化合物の合成法

Country Status (1)

Country Link
JP (1) JPS61223179A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0413425B2 (enrdf_load_stackoverflow) 1992-03-09

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