JPS6122257B2 - - Google Patents

Info

Publication number
JPS6122257B2
JPS6122257B2 JP5427680A JP5427680A JPS6122257B2 JP S6122257 B2 JPS6122257 B2 JP S6122257B2 JP 5427680 A JP5427680 A JP 5427680A JP 5427680 A JP5427680 A JP 5427680A JP S6122257 B2 JPS6122257 B2 JP S6122257B2
Authority
JP
Japan
Prior art keywords
insulating substrate
comb
shaped electrode
semiconductor
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5427680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56151348A (en
Inventor
Keiji Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP5427680A priority Critical patent/JPS56151348A/ja
Publication of JPS56151348A publication Critical patent/JPS56151348A/ja
Publication of JPS6122257B2 publication Critical patent/JPS6122257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP5427680A 1980-04-25 1980-04-25 Nitrogen oxide compound sensor Granted JPS56151348A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5427680A JPS56151348A (en) 1980-04-25 1980-04-25 Nitrogen oxide compound sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5427680A JPS56151348A (en) 1980-04-25 1980-04-25 Nitrogen oxide compound sensor

Publications (2)

Publication Number Publication Date
JPS56151348A JPS56151348A (en) 1981-11-24
JPS6122257B2 true JPS6122257B2 (en:Method) 1986-05-30

Family

ID=12966042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5427680A Granted JPS56151348A (en) 1980-04-25 1980-04-25 Nitrogen oxide compound sensor

Country Status (1)

Country Link
JP (1) JPS56151348A (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58201052A (ja) * 1982-05-20 1983-11-22 Matsushita Electric Ind Co Ltd ガスセンサ
JPS6486052A (en) * 1987-09-29 1989-03-30 Osaka Gas Co Ltd Gas sensor
KR20030021612A (ko) * 2001-09-07 2003-03-15 박진성 이종접합 후막센서 및 그의 제조 방법

Also Published As

Publication number Publication date
JPS56151348A (en) 1981-11-24

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