JPS61218057A - イオンマイクロアナライザ− - Google Patents

イオンマイクロアナライザ−

Info

Publication number
JPS61218057A
JPS61218057A JP60059853A JP5985385A JPS61218057A JP S61218057 A JPS61218057 A JP S61218057A JP 60059853 A JP60059853 A JP 60059853A JP 5985385 A JP5985385 A JP 5985385A JP S61218057 A JPS61218057 A JP S61218057A
Authority
JP
Japan
Prior art keywords
sample
analysis
ion beam
primary ion
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60059853A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527938B2 (https=
Inventor
Katsuhiro Nakagawa
勝博 中川
Eiichi Izumi
泉　栄一
Shoki Yasuda
安田　昭喜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60059853A priority Critical patent/JPS61218057A/ja
Publication of JPS61218057A publication Critical patent/JPS61218057A/ja
Publication of JPH0527938B2 publication Critical patent/JPH0527938B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP60059853A 1985-03-25 1985-03-25 イオンマイクロアナライザ− Granted JPS61218057A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60059853A JPS61218057A (ja) 1985-03-25 1985-03-25 イオンマイクロアナライザ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60059853A JPS61218057A (ja) 1985-03-25 1985-03-25 イオンマイクロアナライザ−

Publications (2)

Publication Number Publication Date
JPS61218057A true JPS61218057A (ja) 1986-09-27
JPH0527938B2 JPH0527938B2 (https=) 1993-04-22

Family

ID=13125164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60059853A Granted JPS61218057A (ja) 1985-03-25 1985-03-25 イオンマイクロアナライザ−

Country Status (1)

Country Link
JP (1) JPS61218057A (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5292786A (en) * 1976-01-30 1977-08-04 Hitachi Ltd Ion microanalyzer
JPS5328488A (en) * 1976-08-30 1978-03-16 Hitachi Ltd Specimen analyzer
JPS5875749A (ja) * 1981-10-30 1983-05-07 Shimadzu Corp 荷電粒子線分析装置の試料位置表示装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5292786A (en) * 1976-01-30 1977-08-04 Hitachi Ltd Ion microanalyzer
JPS5328488A (en) * 1976-08-30 1978-03-16 Hitachi Ltd Specimen analyzer
JPS5875749A (ja) * 1981-10-30 1983-05-07 Shimadzu Corp 荷電粒子線分析装置の試料位置表示装置

Also Published As

Publication number Publication date
JPH0527938B2 (https=) 1993-04-22

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