JPS61215210A - 炭化珪素粉末の製造方法 - Google Patents
炭化珪素粉末の製造方法Info
- Publication number
- JPS61215210A JPS61215210A JP60058006A JP5800685A JPS61215210A JP S61215210 A JPS61215210 A JP S61215210A JP 60058006 A JP60058006 A JP 60058006A JP 5800685 A JP5800685 A JP 5800685A JP S61215210 A JPS61215210 A JP S61215210A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- silicon carbide
- silicon
- carbide powder
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058006A JPS61215210A (ja) | 1985-03-21 | 1985-03-21 | 炭化珪素粉末の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60058006A JPS61215210A (ja) | 1985-03-21 | 1985-03-21 | 炭化珪素粉末の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61215210A true JPS61215210A (ja) | 1986-09-25 |
| JPH0530763B2 JPH0530763B2 (enrdf_load_stackoverflow) | 1993-05-10 |
Family
ID=13071885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60058006A Granted JPS61215210A (ja) | 1985-03-21 | 1985-03-21 | 炭化珪素粉末の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61215210A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990004741A1 (en) * | 1988-10-20 | 1990-05-03 | Ebara Corporation | Combustion apparatus and its combustion control method |
| JP2006206391A (ja) * | 2005-01-28 | 2006-08-10 | Canon Inc | 炭化ケイ素の製造方法 |
-
1985
- 1985-03-21 JP JP60058006A patent/JPS61215210A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990004741A1 (en) * | 1988-10-20 | 1990-05-03 | Ebara Corporation | Combustion apparatus and its combustion control method |
| US5127345A (en) * | 1988-10-20 | 1992-07-07 | Ebara Corporation | Combustion apparatus and combustion control method therefor |
| JP2006206391A (ja) * | 2005-01-28 | 2006-08-10 | Canon Inc | 炭化ケイ素の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530763B2 (enrdf_load_stackoverflow) | 1993-05-10 |
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