JPS61213752A - 鏡面反射特性を有する回転面物体のキズ検出装置 - Google Patents

鏡面反射特性を有する回転面物体のキズ検出装置

Info

Publication number
JPS61213752A
JPS61213752A JP5707685A JP5707685A JPS61213752A JP S61213752 A JPS61213752 A JP S61213752A JP 5707685 A JP5707685 A JP 5707685A JP 5707685 A JP5707685 A JP 5707685A JP S61213752 A JPS61213752 A JP S61213752A
Authority
JP
Japan
Prior art keywords
light source
image data
detection device
circumferential
flaw detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5707685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049466B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Katsushi Ikeuchi
克史 池内
Shigemi Osada
茂美 長田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Fujitsu Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP5707685A priority Critical patent/JPS61213752A/ja
Publication of JPS61213752A publication Critical patent/JPS61213752A/ja
Publication of JPH049466B2 publication Critical patent/JPH049466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
  • Closed-Circuit Television Systems (AREA)
JP5707685A 1985-03-20 1985-03-20 鏡面反射特性を有する回転面物体のキズ検出装置 Granted JPS61213752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5707685A JPS61213752A (ja) 1985-03-20 1985-03-20 鏡面反射特性を有する回転面物体のキズ検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5707685A JPS61213752A (ja) 1985-03-20 1985-03-20 鏡面反射特性を有する回転面物体のキズ検出装置

Publications (2)

Publication Number Publication Date
JPS61213752A true JPS61213752A (ja) 1986-09-22
JPH049466B2 JPH049466B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-20

Family

ID=13045369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5707685A Granted JPS61213752A (ja) 1985-03-20 1985-03-20 鏡面反射特性を有する回転面物体のキズ検出装置

Country Status (1)

Country Link
JP (1) JPS61213752A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63153414A (ja) * 1986-12-17 1988-06-25 Haishisutemu Control Kk 空缶の検査装置
JPS6459145A (en) * 1987-08-31 1989-03-06 Kao Corp Analyzer of surface nature
JPH01129112A (ja) * 1987-11-16 1989-05-22 Ueno Hiroshi 鏡面的光沢のある凸曲面を有する容器口部の形状検査方法と装置
JPH02208504A (ja) * 1989-02-09 1990-08-20 Omron Tateisi Electron Co 球体検査装置
CN109799238A (zh) * 2019-01-24 2019-05-24 常州市武进信和精密机械有限公司 表面处理装置
CN110389089A (zh) * 2019-08-06 2019-10-29 哈尔滨工业大学 大口径反射镜表面颗粒污染物离线暗场检测装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63153414A (ja) * 1986-12-17 1988-06-25 Haishisutemu Control Kk 空缶の検査装置
JPS6459145A (en) * 1987-08-31 1989-03-06 Kao Corp Analyzer of surface nature
JPH01129112A (ja) * 1987-11-16 1989-05-22 Ueno Hiroshi 鏡面的光沢のある凸曲面を有する容器口部の形状検査方法と装置
JPH02208504A (ja) * 1989-02-09 1990-08-20 Omron Tateisi Electron Co 球体検査装置
CN109799238A (zh) * 2019-01-24 2019-05-24 常州市武进信和精密机械有限公司 表面处理装置
CN109799238B (zh) * 2019-01-24 2021-08-31 常州市武进信和精密机械有限公司 表面处理装置
CN110389089A (zh) * 2019-08-06 2019-10-29 哈尔滨工业大学 大口径反射镜表面颗粒污染物离线暗场检测装置

Also Published As

Publication number Publication date
JPH049466B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term