JPS61205153U - - Google Patents
Info
- Publication number
- JPS61205153U JPS61205153U JP8981686U JP8981686U JPS61205153U JP S61205153 U JPS61205153 U JP S61205153U JP 8981686 U JP8981686 U JP 8981686U JP 8981686 U JP8981686 U JP 8981686U JP S61205153 U JPS61205153 U JP S61205153U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- insulating film
- impurity
- doped region
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Description
第1図は従来の半導体装置の1例を示す断面図
、第2図は本考案の半導体装置の第1の実施例を
示す断面図、第3図は本考案の半導体装置の第2
の実施例を示す断面図、第4図は本考案の半導体
装置の第3の実施例を示す断面図である。
11……半導体基板、12……不純物添加領域
、13,13′……絶縁膜、14……外部電極、
41,51,61……N型シリコン基板、42…
…P型ベース領域、43……N型エミツタ領域、
44……N型高濃度領域、45……絶縁膜、46
,46′,46″……アルミニウム電極、51…
…N型シリコン基板、52,53……P型ソース
及びドレイン領域、55……絶縁膜、56……ア
ルミニウム電極、61……N型シリコン基板、6
2……P型不純物添加領域、65……絶縁膜、6
6……アルミニウム電極。
1 is a sectional view showing an example of a conventional semiconductor device, FIG. 2 is a sectional view showing a first embodiment of the semiconductor device of the present invention, and FIG. 3 is a sectional view of a second embodiment of the semiconductor device of the present invention.
FIG. 4 is a sectional view showing a third embodiment of the semiconductor device of the present invention. 11... Semiconductor substrate, 12... Impurity doped region, 13, 13'... Insulating film, 14... External electrode,
41, 51, 61...N-type silicon substrate, 42...
...P type base region, 43...N type emitter region,
44...N-type high concentration region, 45...Insulating film, 46
, 46', 46''...aluminum electrode, 51...
...N type silicon substrate, 52, 53...P type source and drain region, 55...Insulating film, 56...Aluminum electrode, 61...N type silicon substrate, 6
2... P-type impurity doped region, 65... Insulating film, 6
6...Aluminum electrode.
Claims (1)
領域に形成された該半導体基体よりも不純物濃度
の高い不純物添加領域と、該不純物添加領域上に
存する第1の膜厚の第1の絶縁膜と、前記半導体
基体上に存し前記第1の膜厚よりも薄い第2の膜
厚の第2の絶縁膜と、これら第1および第2の絶
縁膜の各一部が連続して除去され前記半導体基体
と前記不純物添加領域の各一部を連続して露出す
る開孔と、前記開孔内に被着されて前記不純物添
加領域および前記半導体基体に接触しかつ前記第
2の絶縁膜上に延在する電極とを有することを特
徴とする半導体装置。 a semiconductor substrate of one conductivity type, an impurity doped region formed in a surface region of the semiconductor substrate and having a higher impurity concentration than the semiconductor substrate, and a first insulating film with a first thickness existing on the impurity doped region. and a second insulating film existing on the semiconductor substrate and having a second thickness thinner than the first film thickness, and a portion of each of the first and second insulating films are successively removed. an opening that continuously exposes a portion of the semiconductor substrate and the impurity-doped region; and a second insulating film deposited in the opening and in contact with the impurity-doped region and the semiconductor substrate and on the second insulating film. What is claimed is: 1. A semiconductor device comprising: an electrode extending from the top to the bottom;
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8981686U JPS61205153U (en) | 1986-06-12 | 1986-06-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8981686U JPS61205153U (en) | 1986-06-12 | 1986-06-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61205153U true JPS61205153U (en) | 1986-12-24 |
Family
ID=30644252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8981686U Pending JPS61205153U (en) | 1986-06-12 | 1986-06-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61205153U (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4941465A (en) * | 1972-03-04 | 1974-04-18 | ||
JPS4975074A (en) * | 1972-11-20 | 1974-07-19 | ||
JPS5023178A (en) * | 1973-06-28 | 1975-03-12 |
-
1986
- 1986-06-12 JP JP8981686U patent/JPS61205153U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4941465A (en) * | 1972-03-04 | 1974-04-18 | ||
JPS4975074A (en) * | 1972-11-20 | 1974-07-19 | ||
JPS5023178A (en) * | 1973-06-28 | 1975-03-12 |