JPS6120059B2 - - Google Patents
Info
- Publication number
- JPS6120059B2 JPS6120059B2 JP5920078A JP5920078A JPS6120059B2 JP S6120059 B2 JPS6120059 B2 JP S6120059B2 JP 5920078 A JP5920078 A JP 5920078A JP 5920078 A JP5920078 A JP 5920078A JP S6120059 B2 JPS6120059 B2 JP S6120059B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- signal recording
- recording medium
- silicon
- silicon monoxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 22
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000008961 swelling Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5920078A JPS54151006A (en) | 1978-05-18 | 1978-05-18 | Signal recording medium and signal recording method for optical video disk or like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5920078A JPS54151006A (en) | 1978-05-18 | 1978-05-18 | Signal recording medium and signal recording method for optical video disk or like |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60209581A Division JPS61105742A (ja) | 1985-09-21 | 1985-09-21 | 信号記録媒体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54151006A JPS54151006A (en) | 1979-11-27 |
| JPS6120059B2 true JPS6120059B2 (zh) | 1986-05-20 |
Family
ID=13106538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5920078A Granted JPS54151006A (en) | 1978-05-18 | 1978-05-18 | Signal recording medium and signal recording method for optical video disk or like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54151006A (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04312964A (ja) * | 1991-04-02 | 1992-11-04 | Mitsubishi Electric Corp | 半導体装置 |
| JPH05206314A (ja) * | 1991-11-12 | 1993-08-13 | Nec Corp | 半導体装置 |
-
1978
- 1978-05-18 JP JP5920078A patent/JPS54151006A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04312964A (ja) * | 1991-04-02 | 1992-11-04 | Mitsubishi Electric Corp | 半導体装置 |
| JPH05206314A (ja) * | 1991-11-12 | 1993-08-13 | Nec Corp | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54151006A (en) | 1979-11-27 |
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