JPS6120031Y2 - - Google Patents

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Publication number
JPS6120031Y2
JPS6120031Y2 JP1981135273U JP13527381U JPS6120031Y2 JP S6120031 Y2 JPS6120031 Y2 JP S6120031Y2 JP 1981135273 U JP1981135273 U JP 1981135273U JP 13527381 U JP13527381 U JP 13527381U JP S6120031 Y2 JPS6120031 Y2 JP S6120031Y2
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JP
Japan
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holder
mask
ring
source
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981135273U
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English (en)
Japanese (ja)
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JPS5842157U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to JP13527381U priority Critical patent/JPS5842157U/ja
Publication of JPS5842157U publication Critical patent/JPS5842157U/ja
Application granted granted Critical
Publication of JPS6120031Y2 publication Critical patent/JPS6120031Y2/ja
Granted legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP13527381U 1981-09-11 1981-09-11 真空蒸着装置 Granted JPS5842157U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13527381U JPS5842157U (ja) 1981-09-11 1981-09-11 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13527381U JPS5842157U (ja) 1981-09-11 1981-09-11 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS5842157U JPS5842157U (ja) 1983-03-19
JPS6120031Y2 true JPS6120031Y2 (enrdf_load_stackoverflow) 1986-06-17

Family

ID=29928647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13527381U Granted JPS5842157U (ja) 1981-09-11 1981-09-11 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS5842157U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS609241U (ja) * 1983-06-28 1985-01-22 株式会社東芝 太陽光発電設備

Also Published As

Publication number Publication date
JPS5842157U (ja) 1983-03-19

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