JPH02136326U - - Google Patents

Info

Publication number
JPH02136326U
JPH02136326U JP4445889U JP4445889U JPH02136326U JP H02136326 U JPH02136326 U JP H02136326U JP 4445889 U JP4445889 U JP 4445889U JP 4445889 U JP4445889 U JP 4445889U JP H02136326 U JPH02136326 U JP H02136326U
Authority
JP
Japan
Prior art keywords
substrate
tray
vapor phase
vapor
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4445889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4445889U priority Critical patent/JPH02136326U/ja
Publication of JPH02136326U publication Critical patent/JPH02136326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP4445889U 1989-04-18 1989-04-18 Pending JPH02136326U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4445889U JPH02136326U (enrdf_load_stackoverflow) 1989-04-18 1989-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4445889U JPH02136326U (enrdf_load_stackoverflow) 1989-04-18 1989-04-18

Publications (1)

Publication Number Publication Date
JPH02136326U true JPH02136326U (enrdf_load_stackoverflow) 1990-11-14

Family

ID=31557781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4445889U Pending JPH02136326U (enrdf_load_stackoverflow) 1989-04-18 1989-04-18

Country Status (1)

Country Link
JP (1) JPH02136326U (enrdf_load_stackoverflow)

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