JPS61195550A - イオン源 - Google Patents

イオン源

Info

Publication number
JPS61195550A
JPS61195550A JP60034372A JP3437285A JPS61195550A JP S61195550 A JPS61195550 A JP S61195550A JP 60034372 A JP60034372 A JP 60034372A JP 3437285 A JP3437285 A JP 3437285A JP S61195550 A JPS61195550 A JP S61195550A
Authority
JP
Japan
Prior art keywords
electrode
ion source
electrodes
divided
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60034372A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574901B2 (enrdf_load_stackoverflow
Inventor
Shinya Sekimoto
関本　信也
Isao Hashimoto
勲 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60034372A priority Critical patent/JPS61195550A/ja
Publication of JPS61195550A publication Critical patent/JPS61195550A/ja
Publication of JPH0574901B2 publication Critical patent/JPH0574901B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60034372A 1985-02-25 1985-02-25 イオン源 Granted JPS61195550A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60034372A JPS61195550A (ja) 1985-02-25 1985-02-25 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60034372A JPS61195550A (ja) 1985-02-25 1985-02-25 イオン源

Publications (2)

Publication Number Publication Date
JPS61195550A true JPS61195550A (ja) 1986-08-29
JPH0574901B2 JPH0574901B2 (enrdf_load_stackoverflow) 1993-10-19

Family

ID=12412338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60034372A Granted JPS61195550A (ja) 1985-02-25 1985-02-25 イオン源

Country Status (1)

Country Link
JP (1) JPS61195550A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394545A (ja) * 1986-10-08 1988-04-25 Hitachi Ltd イオンビ−ムの加工装置
JP2012195177A (ja) * 2011-03-17 2012-10-11 Nissin Ion Equipment Co Ltd スリット電極及びこれを備えた荷電粒子ビーム発生装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740246U (enrdf_load_stackoverflow) * 1980-08-15 1982-03-04
JPS5778800A (en) * 1980-11-04 1982-05-17 Hitachi Ltd Ion source for netral particle incident device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5740246U (enrdf_load_stackoverflow) * 1980-08-15 1982-03-04
JPS5778800A (en) * 1980-11-04 1982-05-17 Hitachi Ltd Ion source for netral particle incident device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6394545A (ja) * 1986-10-08 1988-04-25 Hitachi Ltd イオンビ−ムの加工装置
JP2012195177A (ja) * 2011-03-17 2012-10-11 Nissin Ion Equipment Co Ltd スリット電極及びこれを備えた荷電粒子ビーム発生装置

Also Published As

Publication number Publication date
JPH0574901B2 (enrdf_load_stackoverflow) 1993-10-19

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Legal Events

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