JPH0572720B2 - - Google Patents
Info
- Publication number
- JPH0572720B2 JPH0572720B2 JP26384486A JP26384486A JPH0572720B2 JP H0572720 B2 JPH0572720 B2 JP H0572720B2 JP 26384486 A JP26384486 A JP 26384486A JP 26384486 A JP26384486 A JP 26384486A JP H0572720 B2 JPH0572720 B2 JP H0572720B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating member
- ion beam
- temperature
- passage hole
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 18
- 239000000919 ceramic Substances 0.000 claims description 11
- 230000005684 electric field Effects 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26384486A JPS63119199A (ja) | 1986-11-07 | 1986-11-07 | イオンビーム用静電加速器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26384486A JPS63119199A (ja) | 1986-11-07 | 1986-11-07 | イオンビーム用静電加速器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119199A JPS63119199A (ja) | 1988-05-23 |
| JPH0572720B2 true JPH0572720B2 (enrdf_load_stackoverflow) | 1993-10-12 |
Family
ID=17395007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26384486A Granted JPS63119199A (ja) | 1986-11-07 | 1986-11-07 | イオンビーム用静電加速器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63119199A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3738734B2 (ja) | 2002-02-06 | 2006-01-25 | 日新電機株式会社 | 静電加速管およびそれを備えるイオン注入装置 |
| US7106143B2 (en) | 2004-03-31 | 2006-09-12 | Frequency Electronics, Inc. | Method for achieving highly reproducible acceleration insensitive quartz crystal oscillators |
| CN102598195B (zh) * | 2009-09-18 | 2015-09-16 | Fei公司 | 分布式离子源加速镜筒 |
-
1986
- 1986-11-07 JP JP26384486A patent/JPS63119199A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63119199A (ja) | 1988-05-23 |
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