JPS63119199A - イオンビーム用静電加速器 - Google Patents
イオンビーム用静電加速器Info
- Publication number
- JPS63119199A JPS63119199A JP26384486A JP26384486A JPS63119199A JP S63119199 A JPS63119199 A JP S63119199A JP 26384486 A JP26384486 A JP 26384486A JP 26384486 A JP26384486 A JP 26384486A JP S63119199 A JPS63119199 A JP S63119199A
- Authority
- JP
- Japan
- Prior art keywords
- insulating member
- temperature
- tube
- ion beam
- accelerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001133 acceleration Effects 0.000 title description 10
- 239000000919 ceramic Substances 0.000 claims description 13
- 238000010884 ion-beam technique Methods 0.000 claims description 11
- 230000005684 electric field Effects 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26384486A JPS63119199A (ja) | 1986-11-07 | 1986-11-07 | イオンビーム用静電加速器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26384486A JPS63119199A (ja) | 1986-11-07 | 1986-11-07 | イオンビーム用静電加速器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119199A true JPS63119199A (ja) | 1988-05-23 |
| JPH0572720B2 JPH0572720B2 (enrdf_load_stackoverflow) | 1993-10-12 |
Family
ID=17395007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26384486A Granted JPS63119199A (ja) | 1986-11-07 | 1986-11-07 | イオンビーム用静電加速器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63119199A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7098614B2 (en) | 2002-02-06 | 2006-08-29 | Nissin Ion Equipment Co., Ltd. | Electrostatic accelerator and ion implanting apparatus with the same |
| US7106143B2 (en) | 2004-03-31 | 2006-09-12 | Frequency Electronics, Inc. | Method for achieving highly reproducible acceleration insensitive quartz crystal oscillators |
| CN102598195A (zh) * | 2009-09-18 | 2012-07-18 | Fei公司 | 分布式离子源加速镜筒 |
-
1986
- 1986-11-07 JP JP26384486A patent/JPS63119199A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7098614B2 (en) | 2002-02-06 | 2006-08-29 | Nissin Ion Equipment Co., Ltd. | Electrostatic accelerator and ion implanting apparatus with the same |
| US7106143B2 (en) | 2004-03-31 | 2006-09-12 | Frequency Electronics, Inc. | Method for achieving highly reproducible acceleration insensitive quartz crystal oscillators |
| CN102598195A (zh) * | 2009-09-18 | 2012-07-18 | Fei公司 | 分布式离子源加速镜筒 |
| JP2013505545A (ja) * | 2009-09-18 | 2013-02-14 | エフ・イ−・アイ・カンパニー | 分散イオン源加速カラム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0572720B2 (enrdf_load_stackoverflow) | 1993-10-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5030895A (en) | Field emitter array comparator | |
| US4715054A (en) | Plasma x-ray source | |
| JPH0119253B2 (enrdf_load_stackoverflow) | ||
| JPH0729532A (ja) | Ｘ線装置 | |
| CN115681052B (zh) | 霍尔推力器、具有其的设备及其使用方法 | |
| JPS62235485A (ja) | イオン源装置 | |
| DE3572075D1 (en) | Liquid-cooled electrical cable | |
| JPS63119199A (ja) | イオンビーム用静電加速器 | |
| CN109900421B (zh) | 电离规和用于对高速中性气团的瞬态压强进行测量的系统 | |
| JP2001185608A (ja) | 要素上の導電性材料の移動を減少させる方法及び装置 | |
| US3164739A (en) | Ion source of a duo-plasmatron | |
| US3683214A (en) | Heat pipe electrogasdynamic converter | |
| US5013969A (en) | Protective device for neutron tubes | |
| JPH01266865A (ja) | コロナ放電用針状電極およびその電極を用いたイオン発生器 | |
| US3549914A (en) | Monolithic electrodes for mhd generators | |
| US4115722A (en) | Corona-shield for an image-tube photocathode | |
| JP3422071B2 (ja) | イオン源装置 | |
| JPS59191300A (ja) | 荷電粒子加速装置 | |
| JPH087827A (ja) | ビームガイド | |
| US3791298A (en) | Electrical switching device employing a vaporizable conductive element | |
| JPS5742509A (en) | Ozone generator | |
| JPS62271334A (ja) | イオン注入装置のイオン源 | |
| JPH0345857B2 (enrdf_load_stackoverflow) | ||
| JPH0629920Y2 (ja) | 電子貯蔵加速器のパ−タベ−タ | |
| JPS60151945A (ja) | Ｘ線発生装置 |