JPS61195550A - Ion source electrode - Google Patents

Abstract

PURPOSE:To produce an ion source electrode which exhibits only a little thermal deformation despite having a large area by using independent electrodes each of which is divided into several blocks. CONSTITUTION:An accelerating electrode 5 for accelerating ions, a decelerating electrode 6 and an earthing electrode 7 are fixed to an electrode-supporting metallic part 7 while being separated from each other by means of insulating spacers 8 made of ceramics or similar material. Each of these electrodes are also divided in the direction perpendicular to accelerated ions into several blocks and the divided blocks constitute the accelerating, the decelerating and the earthing electrodes 5-7 which constitute an ion source electrode. Due to the above structure, the thermal deformation of each block of the ion source electrode is minimal. furthermore, as it is possible to remove only an intended block without decomposing the whole electrode during maintenance, the time for maintenance can be reduced.

Description

[Detailed Description of the Invention] Tatami [Field of Application of the Invention] The present invention relates to a device that enables the production of a large ion source, specifically, an ion source electrode that is divided into several independent blocks. This invention relates to an ion electrode that can be made larger by using a combination of the following.

[Background of the invention]

As described in Japanese Patent Application Laid-Open No. 57-78800, a conventional ion source electrode has several rectangular, circular, or spherical electrodes stacked in the direction in which ions are accelerated. However, as ion sources become more widely used, larger in size, and a variety of electrode materials are used, support structures become difficult due to thermal deformation of the electrodes, and large electrode materials cannot be manufactured. However, this point was not taken into consideration.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide an ion source electrode that exhibits small thermal deformation and has a large area.

[Summary of the invention]

The electrodes for accelerating ions are designed to accelerate the ions by applying a voltage between two or more electrodes with an insulating material between them. The temperature rises due to the heat generated by the collision, but this temperature rise leads to deformation of the electrodes, resulting in poor ion directionality. This means that the larger the diameter, the greater the amount of phase deformation, and the larger the diameter, the more problems arise with the material of the electrodes, making it impossible to manufacture them. Therefore, by combining the electrodes divided into small blocks,
This structure achieves the above-mentioned object by providing an electrode with a large area and little deformation.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be explained with reference to FIG. 1.A plasma chamber 1 includes a current introduction terminal 3 for introducing a filament current and heating a filament 2, and a terminal for introducing a gas such as hydrogen or argon. There is a gas inlet 4. An accelerating electrode 5, a decelerating electrode 6, and a grounding electrode 7 for accelerating ions are fixed to an electrode support fitting 9 while maintaining a gap between each electrode with an insulating spacer 8 made of ceramic or the like.

Each electrode is also divided into several pieces in the plane perpendicular to the accelerated ions, as shown in Figure 2, and each divided block is a combination of acceleration, deceleration, and ground electrodes 5, 6, and 7. be independent.

In this way, since the electrode is divided into several blocks, an ion source electrode with small thermal deformation within each block can be obtained. Furthermore, since only necessary blocks can be removed without disassembling the entire electrode during maintenance, maintenance time can be shortened.

〔Effect of the invention〕

As is clear from the above explanation, according to the present invention, by dividing the electrodes and making them independent, it is possible to obtain an ion source electrode with little thermal deformation despite having a large electrode area.

[Brief explanation of drawings]

FIG. 1 is a side sectional view of an ion source showing an embodiment of the present invention, and FIG. 2 is a sectional view taken along line A and -A in FIG. 1... plasma chamber, 2... filament, 3...
Current introduction terminal, 4...Gas inlet, 5...Acceleration electrode, 6...Deceleration electrode, 7...Grounding electrode, 8...Spacer, 9...Electrode support fitting, 10...・Block electrode.

Claims (1)

[Claims] 1. A plasma chamber for introducing gas, etc. and turning this gas, etc. into plasma, and 2. For extracting ions from the plasma chamber.
An ion source electrode comprising at least two stacked electrodes, characterized in that each electrode is divided into at least two or more electrodes.