JPS61191847U - - Google Patents
Info
- Publication number
- JPS61191847U JPS61191847U JP1985074144U JP7414485U JPS61191847U JP S61191847 U JPS61191847 U JP S61191847U JP 1985074144 U JP1985074144 U JP 1985074144U JP 7414485 U JP7414485 U JP 7414485U JP S61191847 U JPS61191847 U JP S61191847U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- carrier
- rotary table
- swing arm
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 6
- 230000032258 transport Effects 0.000 claims 1
Landscapes
- Feeding Of Workpieces (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985074144U JPH0329083Y2 (US06521211-20030218-C00004.png) | 1985-05-21 | 1985-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985074144U JPH0329083Y2 (US06521211-20030218-C00004.png) | 1985-05-21 | 1985-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61191847U true JPS61191847U (US06521211-20030218-C00004.png) | 1986-11-29 |
| JPH0329083Y2 JPH0329083Y2 (US06521211-20030218-C00004.png) | 1991-06-21 |
Family
ID=30614163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985074144U Expired JPH0329083Y2 (US06521211-20030218-C00004.png) | 1985-05-21 | 1985-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0329083Y2 (US06521211-20030218-C00004.png) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002321132A (ja) * | 2001-04-23 | 2002-11-05 | Fujikoshi Mach Corp | ワークの搬送装置 |
| JP2008110477A (ja) * | 2008-02-01 | 2008-05-15 | Sumitomo Metal Fine Technology Co Ltd | 両面研摩装置 |
| WO2023162922A1 (ja) * | 2022-02-24 | 2023-08-31 | 三菱マテリアルテクノ株式会社 | 搬送装置、研磨装置、及び搬送方法 |
| WO2023162924A1 (ja) * | 2022-02-24 | 2023-08-31 | 三菱マテリアルテクノ株式会社 | 移載装置、研磨設備、及び移載方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6480735B2 (ja) * | 2015-01-09 | 2019-03-13 | 株式会社アマダホールディングス | 板材ストック装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58223561A (ja) * | 1982-06-16 | 1983-12-26 | Disco Abrasive Sys Ltd | ポリツシングマシン |
| JPS59156665A (ja) * | 1984-02-03 | 1984-09-05 | Supiide Fuamu Kk | 平面研削装置 |
-
1985
- 1985-05-21 JP JP1985074144U patent/JPH0329083Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58223561A (ja) * | 1982-06-16 | 1983-12-26 | Disco Abrasive Sys Ltd | ポリツシングマシン |
| JPS59156665A (ja) * | 1984-02-03 | 1984-09-05 | Supiide Fuamu Kk | 平面研削装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002321132A (ja) * | 2001-04-23 | 2002-11-05 | Fujikoshi Mach Corp | ワークの搬送装置 |
| JP2008110477A (ja) * | 2008-02-01 | 2008-05-15 | Sumitomo Metal Fine Technology Co Ltd | 両面研摩装置 |
| WO2023162922A1 (ja) * | 2022-02-24 | 2023-08-31 | 三菱マテリアルテクノ株式会社 | 搬送装置、研磨装置、及び搬送方法 |
| WO2023162924A1 (ja) * | 2022-02-24 | 2023-08-31 | 三菱マテリアルテクノ株式会社 | 移載装置、研磨設備、及び移載方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0329083Y2 (US06521211-20030218-C00004.png) | 1991-06-21 |
