JPS6119111B2 - - Google Patents

Info

Publication number
JPS6119111B2
JPS6119111B2 JP55097223A JP9722380A JPS6119111B2 JP S6119111 B2 JPS6119111 B2 JP S6119111B2 JP 55097223 A JP55097223 A JP 55097223A JP 9722380 A JP9722380 A JP 9722380A JP S6119111 B2 JPS6119111 B2 JP S6119111B2
Authority
JP
Japan
Prior art keywords
groove
insulating material
semiconductor substrate
film
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55097223A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5723239A (en
Inventor
Hiroshi Iwai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP9722380A priority Critical patent/JPS5723239A/ja
Priority to US06/282,642 priority patent/US4394196A/en
Priority to DE8181105523T priority patent/DE3177018D1/de
Priority to DE8686116670T priority patent/DE3177250D1/de
Priority to EP81105523A priority patent/EP0044082B1/en
Priority to EP86116670A priority patent/EP0245538B1/en
Publication of JPS5723239A publication Critical patent/JPS5723239A/ja
Publication of JPS6119111B2 publication Critical patent/JPS6119111B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—
    • H10W10/0145—
    • H10W10/17—

Landscapes

  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
JP9722380A 1980-07-16 1980-07-16 Manufacture of semiconductor device Granted JPS5723239A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP9722380A JPS5723239A (en) 1980-07-16 1980-07-16 Manufacture of semiconductor device
US06/282,642 US4394196A (en) 1980-07-16 1981-07-13 Method of etching, refilling and etching dielectric grooves for isolating micron size device regions
DE8181105523T DE3177018D1 (en) 1980-07-16 1981-07-14 Method of manufacturing a semiconductor device comprising a dielectric insulating region
DE8686116670T DE3177250D1 (de) 1980-07-16 1981-07-14 Verfahren zur herstellung einer halbleiteranordnung mit dielektrischen isolationszonen.
EP81105523A EP0044082B1 (en) 1980-07-16 1981-07-14 Method of manufacturing a semiconductor device comprising a dielectric insulating region
EP86116670A EP0245538B1 (en) 1980-07-16 1981-07-14 Method for manufacturing a semiconductor device comprising dielectric isolation regions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9722380A JPS5723239A (en) 1980-07-16 1980-07-16 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5723239A JPS5723239A (en) 1982-02-06
JPS6119111B2 true JPS6119111B2 (index.php) 1986-05-15

Family

ID=14186628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9722380A Granted JPS5723239A (en) 1980-07-16 1980-07-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5723239A (index.php)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034034A (ja) * 1983-08-05 1985-02-21 Hitachi Ltd 半導体装置
JP2870793B2 (ja) * 1989-04-14 1999-03-17 日本電気株式会社 半導体装置の製造方法
US6426305B1 (en) 2001-07-03 2002-07-30 International Business Machines Corporation Patterned plasma nitridation for selective epi and silicide formation
JP2005303253A (ja) * 2004-03-18 2005-10-27 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法
KR101575818B1 (ko) 2009-08-18 2015-12-08 삼성전자주식회사 활성 영역 구조물의 형성방법

Also Published As

Publication number Publication date
JPS5723239A (en) 1982-02-06

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