JPS61190132U - - Google Patents

Info

Publication number
JPS61190132U
JPS61190132U JP7434985U JP7434985U JPS61190132U JP S61190132 U JPS61190132 U JP S61190132U JP 7434985 U JP7434985 U JP 7434985U JP 7434985 U JP7434985 U JP 7434985U JP S61190132 U JPS61190132 U JP S61190132U
Authority
JP
Japan
Prior art keywords
correction plate
reactive ion
ion etching
etched
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7434985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7434985U priority Critical patent/JPS61190132U/ja
Publication of JPS61190132U publication Critical patent/JPS61190132U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP7434985U 1985-05-20 1985-05-20 Pending JPS61190132U (US20110009641A1-20110113-C00116.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7434985U JPS61190132U (US20110009641A1-20110113-C00116.png) 1985-05-20 1985-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7434985U JPS61190132U (US20110009641A1-20110113-C00116.png) 1985-05-20 1985-05-20

Publications (1)

Publication Number Publication Date
JPS61190132U true JPS61190132U (US20110009641A1-20110113-C00116.png) 1986-11-27

Family

ID=30614564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7434985U Pending JPS61190132U (US20110009641A1-20110113-C00116.png) 1985-05-20 1985-05-20

Country Status (1)

Country Link
JP (1) JPS61190132U (US20110009641A1-20110113-C00116.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108527A (ja) * 1985-11-06 1987-05-19 Anelva Corp ドライエツチング装置
JPH01298182A (ja) * 1988-05-27 1989-12-01 Hitachi Ltd エッチング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108527A (ja) * 1985-11-06 1987-05-19 Anelva Corp ドライエツチング装置
JPH01298182A (ja) * 1988-05-27 1989-12-01 Hitachi Ltd エッチング装置

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