JPS6118804A - 光学式表面粗さ計 - Google Patents

光学式表面粗さ計

Info

Publication number
JPS6118804A
JPS6118804A JP13901684A JP13901684A JPS6118804A JP S6118804 A JPS6118804 A JP S6118804A JP 13901684 A JP13901684 A JP 13901684A JP 13901684 A JP13901684 A JP 13901684A JP S6118804 A JPS6118804 A JP S6118804A
Authority
JP
Japan
Prior art keywords
surface roughness
measurement
optical surface
light
roughness meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13901684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0414283B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Koji Nakazawa
中沢　宏治
Yoshisada Oshida
良忠 押田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13901684A priority Critical patent/JPS6118804A/ja
Publication of JPS6118804A publication Critical patent/JPS6118804A/ja
Publication of JPH0414283B2 publication Critical patent/JPH0414283B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13901684A 1984-07-06 1984-07-06 光学式表面粗さ計 Granted JPS6118804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13901684A JPS6118804A (ja) 1984-07-06 1984-07-06 光学式表面粗さ計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13901684A JPS6118804A (ja) 1984-07-06 1984-07-06 光学式表面粗さ計

Publications (2)

Publication Number Publication Date
JPS6118804A true JPS6118804A (ja) 1986-01-27
JPH0414283B2 JPH0414283B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-12

Family

ID=15235503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13901684A Granted JPS6118804A (ja) 1984-07-06 1984-07-06 光学式表面粗さ計

Country Status (1)

Country Link
JP (1) JPS6118804A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174610A (ja) * 1986-01-28 1987-07-31 Masaaki Adachi 表面粗さ測定装置
US5189491A (en) * 1990-06-11 1993-02-23 Matsushita Electric Industrial Co., Ltd. Method of measuring track displacement on a magnetic tape

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174610A (ja) * 1986-01-28 1987-07-31 Masaaki Adachi 表面粗さ測定装置
US5189491A (en) * 1990-06-11 1993-02-23 Matsushita Electric Industrial Co., Ltd. Method of measuring track displacement on a magnetic tape

Also Published As

Publication number Publication date
JPH0414283B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-12

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