JPS61183108A - 窒化アルミニウム微粉末の製造法 - Google Patents
窒化アルミニウム微粉末の製造法Info
- Publication number
- JPS61183108A JPS61183108A JP2397885A JP2397885A JPS61183108A JP S61183108 A JPS61183108 A JP S61183108A JP 2397885 A JP2397885 A JP 2397885A JP 2397885 A JP2397885 A JP 2397885A JP S61183108 A JPS61183108 A JP S61183108A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- alkoxide
- carbon
- aluminum
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title claims abstract description 30
- 229910017083 AlN Inorganic materials 0.000 title 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 title 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 26
- 239000000203 mixture Substances 0.000 claims abstract description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 claims abstract description 8
- 239000012299 nitrogen atmosphere Substances 0.000 claims abstract 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 18
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- -1 aluminum alkoxide Chemical class 0.000 claims description 16
- 239000003960 organic solvent Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 abstract description 13
- 150000004703 alkoxides Chemical class 0.000 abstract description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 6
- 239000006229 carbon black Substances 0.000 abstract description 4
- 239000002904 solvent Substances 0.000 abstract description 4
- 230000003301 hydrolyzing effect Effects 0.000 abstract 2
- 229910021502 aluminium hydroxide Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 229910001679 gibbsite Inorganic materials 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 11
- 238000005121 nitriding Methods 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005262 decarbonization Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 1
- SMZOGRDCAXLAAR-UHFFFAOYSA-N aluminium isopropoxide Chemical compound [Al+3].CC(C)[O-].CC(C)[O-].CC(C)[O-] SMZOGRDCAXLAAR-UHFFFAOYSA-N 0.000 description 1
- JPUHCPXFQIXLMW-UHFFFAOYSA-N aluminium triethoxide Chemical compound CCO[Al](OCC)OCC JPUHCPXFQIXLMW-UHFFFAOYSA-N 0.000 description 1
- 229960004424 carbon dioxide Drugs 0.000 description 1
- 239000007809 chemical reaction catalyst Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0726—Preparation by carboreductive nitridation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2397885A JPS61183108A (ja) | 1985-02-09 | 1985-02-09 | 窒化アルミニウム微粉末の製造法 |
| US06/788,577 US4643859A (en) | 1985-01-26 | 1985-10-17 | Process for the production of fine non-oxide powders from alkoxides |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2397885A JPS61183108A (ja) | 1985-02-09 | 1985-02-09 | 窒化アルミニウム微粉末の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61183108A true JPS61183108A (ja) | 1986-08-15 |
| JPH0456767B2 JPH0456767B2 (enrdf_load_stackoverflow) | 1992-09-09 |
Family
ID=12125642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2397885A Granted JPS61183108A (ja) | 1985-01-26 | 1985-02-09 | 窒化アルミニウム微粉末の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183108A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4780299A (en) * | 1986-11-28 | 1988-10-25 | Kawasaki Steel Corporation | Method for producing aluminum nitride powder |
| US4865830A (en) * | 1988-01-27 | 1989-09-12 | E. I. Du Pont De Nemours And Company | Gas phase preparation of aluminum nitride |
| KR100411287B1 (ko) * | 1996-12-18 | 2004-04-03 | 주식회사 포스코 | 단분산 수산화알루미늄 미립자의 제조방법 |
| WO2010008038A1 (ja) * | 2008-07-17 | 2010-01-21 | 株式会社ブリヂストン | 窒化アルミニウム粉体の製造方法及び窒化アルミニウム前駆体、及び窒化アルミニウム粉体を用いた窒化アルミニウム焼結体の製造方法 |
| CN113603067A (zh) * | 2021-08-31 | 2021-11-05 | 山东瞻驰新材料有限公司 | 一种铝醇盐直接氮化制备氮化铝的方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138898A (en) * | 1978-04-21 | 1979-10-27 | Toshiba Corp | Production of silicon nitride powder |
| JPS54138899A (en) * | 1978-04-21 | 1979-10-27 | Toshiba Corp | Production of silicon nitridg base powder |
| JPS54139619A (en) * | 1978-04-21 | 1979-10-30 | Tokyo Shibaura Electric Co | Manufacture of highly pure ceramic powder |
| JPS5949828A (ja) * | 1982-09-14 | 1984-03-22 | Mitsui Toatsu Chem Inc | 新規な含炭素混合物 |
| JPS616104A (ja) * | 1984-06-19 | 1986-01-11 | Tokuyama Soda Co Ltd | 窒化アルミニウム粉末の製造方法 |
-
1985
- 1985-02-09 JP JP2397885A patent/JPS61183108A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138898A (en) * | 1978-04-21 | 1979-10-27 | Toshiba Corp | Production of silicon nitride powder |
| JPS54138899A (en) * | 1978-04-21 | 1979-10-27 | Toshiba Corp | Production of silicon nitridg base powder |
| JPS54139619A (en) * | 1978-04-21 | 1979-10-30 | Tokyo Shibaura Electric Co | Manufacture of highly pure ceramic powder |
| JPS5949828A (ja) * | 1982-09-14 | 1984-03-22 | Mitsui Toatsu Chem Inc | 新規な含炭素混合物 |
| JPS616104A (ja) * | 1984-06-19 | 1986-01-11 | Tokuyama Soda Co Ltd | 窒化アルミニウム粉末の製造方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4780299A (en) * | 1986-11-28 | 1988-10-25 | Kawasaki Steel Corporation | Method for producing aluminum nitride powder |
| US4865830A (en) * | 1988-01-27 | 1989-09-12 | E. I. Du Pont De Nemours And Company | Gas phase preparation of aluminum nitride |
| KR100411287B1 (ko) * | 1996-12-18 | 2004-04-03 | 주식회사 포스코 | 단분산 수산화알루미늄 미립자의 제조방법 |
| WO2010008038A1 (ja) * | 2008-07-17 | 2010-01-21 | 株式会社ブリヂストン | 窒化アルミニウム粉体の製造方法及び窒化アルミニウム前駆体、及び窒化アルミニウム粉体を用いた窒化アルミニウム焼結体の製造方法 |
| CN113603067A (zh) * | 2021-08-31 | 2021-11-05 | 山东瞻驰新材料有限公司 | 一种铝醇盐直接氮化制备氮化铝的方法 |
| CN113603067B (zh) * | 2021-08-31 | 2023-03-10 | 山东瞻驰新材料有限公司 | 一种铝醇盐直接氮化制备氮化铝的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0456767B2 (enrdf_load_stackoverflow) | 1992-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |