JPS6118235Y2 - - Google Patents
Info
- Publication number
- JPS6118235Y2 JPS6118235Y2 JP11746779U JP11746779U JPS6118235Y2 JP S6118235 Y2 JPS6118235 Y2 JP S6118235Y2 JP 11746779 U JP11746779 U JP 11746779U JP 11746779 U JP11746779 U JP 11746779U JP S6118235 Y2 JPS6118235 Y2 JP S6118235Y2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- pump
- shaft
- pressure
- sampling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005070 sampling Methods 0.000 claims description 28
- 238000007789 sealing Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 24
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11746779U JPS6118235Y2 (enrdf_load_stackoverflow) | 1979-08-28 | 1979-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11746779U JPS6118235Y2 (enrdf_load_stackoverflow) | 1979-08-28 | 1979-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5635591U JPS5635591U (enrdf_load_stackoverflow) | 1981-04-06 |
| JPS6118235Y2 true JPS6118235Y2 (enrdf_load_stackoverflow) | 1986-06-03 |
Family
ID=29349679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11746779U Expired JPS6118235Y2 (enrdf_load_stackoverflow) | 1979-08-28 | 1979-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6118235Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62174592A (ja) * | 1985-10-12 | 1987-07-31 | Kobe Steel Ltd | スクリユ式真空ポンプ |
| JP2020105931A (ja) * | 2018-12-26 | 2020-07-09 | 株式会社デンソーウェーブ | 小型真空ポンプ、及びポンプ内蔵型ロボットハンド |
-
1979
- 1979-08-28 JP JP11746779U patent/JPS6118235Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5635591U (enrdf_load_stackoverflow) | 1981-04-06 |
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