JPS61178608A - Flatness detector - Google Patents

Flatness detector

Info

Publication number
JPS61178608A
JPS61178608A JP60020475A JP2047585A JPS61178608A JP S61178608 A JPS61178608 A JP S61178608A JP 60020475 A JP60020475 A JP 60020475A JP 2047585 A JP2047585 A JP 2047585A JP S61178608 A JPS61178608 A JP S61178608A
Authority
JP
Japan
Prior art keywords
arc length
signal
minimum value
strip
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60020475A
Other languages
Japanese (ja)
Other versions
JPH0414728B2 (en
Inventor
Masayuki Sugiyama
昌之 杉山
Kazuo Takashima
和夫 高嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60020475A priority Critical patent/JPS61178608A/en
Publication of JPS61178608A publication Critical patent/JPS61178608A/en
Publication of JPH0414728B2 publication Critical patent/JPH0414728B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G01B7/345Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21BROLLING OF METAL
    • B21B38/00Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product
    • B21B38/02Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product for measuring flatness or profile of strips

Abstract

PURPOSE:To obtain an apparatus of higher standard of accuracy, to furnish the apparatus with a plurality of low-path filter for cutting high-frequency of a distance signal, arc-length calculating set for the arc-length of the distance signal and the least-value detecting set for the least value of arc-length signal. CONSTITUTION:A flatness detector is provided with a plurality of low-path filters 5 for cutting high-frequency wave of distance signal measured by a plurality of distance measuring sets, a plurality of arc-length calculating sets 3 for calculating arc-length of the signal from this filters 5, the least value detecting set 6 detecting the least value of output from the arc-length calculating sets 3, and relative elongation ratio calculating set calculating the relative elongation ratio from arc-length signal of each channel and the least value signal of the arc-length signal. In this case, in order to remove vibration and wavy motion of a ribbon material, as low-path filter and least value detecting set are added, detection can be limited only to detective shapes and accordingly, accuracy can be improved.

Description

【発明の詳細な説明】 この発明は移動する帯状体上の板巾方向の複数箇所で帯
状体の変位を測定することにより、帯状体の平坦度を検
出する平坦度検出装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a flatness detection device that detects the flatness of a moving strip by measuring the displacement of the strip at a plurality of locations in the width direction of the strip.

〔従来の技術〕[Conventional technology]

M間圧延ラインにおいて、被圧延体すなわち帯状体の中
のび、耳波等の形状不良は顕在化しており、直接帯状体
の板巾方向の複数箇所で帯状体の変位または傾き等を測
定することによって、帯状体の平坦度を検出することが
可能であることはよく知られている。
In the M rolling line, shape defects such as elongation and ear waves in the rolled object, i.e., the strip, have become apparent, so it is necessary to directly measure the displacement or inclination of the strip at multiple locations in the width direction of the strip. It is well known that it is possible to detect the flatness of a strip by

第1図は、帯状体上の板巾方向の複数箇所で帯状体の変
位を測定することを手段として帯状体の平坦度を検出す
る平坦度検出itの一般的な例を示す。
FIG. 1 shows a general example of flatness detection IT that detects the flatness of a strip by measuring the displacement of the strip at a plurality of locations in the width direction of the strip.

第1図において、(1)は被測定体すなわち帯状体1(
IA)は帯状体の距離信号、(2)は距離測定器から帯
状体までの距離を測定する距離測定器で帯状体から所定
の間隔をもって帯状体上の巾方向に複数台設置される。
In FIG. 1, (1) represents the object to be measured, that is, the strip 1 (
IA) is a distance signal of the strip, and (2) is a distance measuring device for measuring the distance from the distance measuring device to the strip. A plurality of distance measuring devices are installed in the width direction on the strip at a predetermined interval from the strip.

(3)は距離測定器より出力される帯状体の距離信号の
弧長を演算する弧長演算器、(4)は弧長演算器によっ
て演算された弧長と直線との比を演算する伸び率演算器
である。
(3) is an arc length calculator that calculates the arc length of the distance signal of the strip output from the distance measuring device, and (4) is an elongation calculator that calculates the ratio of the arc length calculated by the arc length calculator to the straight line. It is a rate calculator.

次に動作について説明する。Next, the operation will be explained.

第2図の如く、時刻tにおける距離測定器から帯状体ま
での距離yIと時刻t+Δtにおける距離測定器から帯
状体までの距離Y I+1によって1帯状体の変位Δy
iは次にように求められる。
As shown in Fig. 2, the displacement Δy of one strip is determined by the distance yI from the distance measuring device to the strip at time t and the distance Y I+1 from the distance measuring device to the strip at time t+Δt.
i is calculated as follows.

Δy+=y+  y++1       ・・・(1)
また、時刻tから時刻t+Δtの間に帯状体は速度Vで
移動するから、帯状体の移動距離Δχ1よΔxl=y’
Δt             ・・・(2)のように
表わされる。時刻tから時刻t+Δtの間に移動した帯
状体の長さΔ8iは(1)式と(2)式からΔ13i=
π20「箇;闇Y  ・・・(3)で得られ1さらに、
ポイント0からポイントnまで移動した帯状体の長さS
は(3)式よりで求められる。
Δy+=y+ y++1...(1)
Also, since the strip moves at a speed V between time t and time t+Δt, the moving distance of the strip is Δχ1, so Δxl=y'
Δt is expressed as (2). The length Δ8i of the band-shaped body moved between time t and time t+Δt is calculated from equations (1) and (2) as follows: Δ13i=
π20 "b; Darkness Y...1 obtained by (3), and
Length S of the strip moved from point 0 to point n
is obtained from equation (3).

一方、平坦な帯状体がポイント0からディントロまで移
動したと仮定すると、移動した帯状体の長さは帯状体の
移動距離に等しく、移動した平坦な帯状体の長さlは J=(n−1)φΔXi      ・・・(5)で表
わされる。よって移動した平坦な帯状体の長さlを基準
とした帯状体の伸び率βは、(4)式と(5)式より で求められる。
On the other hand, assuming that the flat strip moves from point 0 to Dintro, the length of the moved strip is equal to the distance the strip moved, and the length l of the moved flat strip is J = (n- 1) φΔXi ... is expressed as (5). Therefore, the elongation rate β of the strip based on the length l of the moved flat strip can be obtained from equations (4) and (5).

以上のような手順によって、帯状体上の板巾の複数箇所
で伸び率βを求めることができる。この伸び率βの大き
さが形状不良の大きさを表わす。
By the above-described procedure, the elongation rate β can be determined at a plurality of locations on the strip width. The magnitude of this elongation rate β represents the magnitude of the shape defect.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来の平坦度検出装置は以上のように構成されているの
で、帯状体の振動及びうねりによる変動は、見掛は上弧
長に変換され実際の帯状体の形状不良より大きな値を検
出してしまうという欠点があった。さらに、帯状体の振
動及びうねりに大きく影響されるという欠点があった。
Since the conventional flatness detection device is configured as described above, fluctuations due to vibration and waviness of the strip are converted into an apparent upper arc length, and a value larger than the actual shape defect of the strip is detected. There was a drawback that it could be stored away. Furthermore, there is a drawback that it is greatly affected by vibrations and waviness of the band-shaped body.

この発明は上記のような従来のものの欠点を除去するた
めになされたもので、帯状体の振動及びうねりによる変
動を除去し、精度の高い平坦度を検出できる平坦度検出
装置を提供することを目的とするものである。
This invention was made in order to eliminate the drawbacks of the conventional devices as described above, and aims to provide a flatness detection device that can detect flatness with high accuracy by eliminating fluctuations due to vibration and waviness of a band-shaped body. This is the purpose.

〔問題点を解決するための手段〕[Means for solving problems]

この発明の平坦度検出装置は、複数台の距離測定器によ
って測定された距離信号の高周波をカットスる複数台の
ローパスフィ〃りと、このローパスフィルタからの信号
の弧長を演算する複数台の弧長演算器と、この弧長演算
器からの出力の最小値を検出する最小値検出器と、各チ
ャンネ〃の弧長信号と弧長信号の最小値信号から相対伸
び率を演算する相対伸び率演算器とを備えたものである
The flatness detection device of the present invention includes a plurality of low-pass filters that cut out high frequencies of distance signals measured by a plurality of distance measuring devices, and a plurality of arc filters that calculate the arc length of the signal from the low-pass filters. A length calculator, a minimum value detector that detects the minimum value of the output from this arc length calculator, and a relative elongation rate that calculates the relative elongation rate from the arc length signal of each channel and the minimum value signal of the arc length signal. It is equipped with a computing unit.

〔作用〕[Effect]

この発明においては、帯状体の振動及びうねりによる変
動を、ローパスフィルタと最小値検出器を用いて除去し
、精度高く平坦度を検出する。
In the present invention, fluctuations due to vibration and waviness of the band-shaped body are removed using a low-pass filter and a minimum value detector, and flatness is detected with high accuracy.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。第8
図において、(1)は被測定体すなわち帯状体、(IA
)は帯状体の距離信号、(2)は距離測定器から帯状体
までの距離を測定する距離測定器で帯状体から所定の間
隔をもって帯状体上の巾方向に複数台設置される。(I
s)は距離測定器より出力される帯状体の距離信号の高
周波をカットするローパスフイμり、(3)は帯状体の
距離信号の高周波をカットしたローパスフイ〃りの出力
信号の弧長を演算する弧長演算器、(6)は複数台の弧
長演算器の弧長信号の最小値を検出する最小値検出器、
(7)は弧長演算器よりの弧長信号と、最小値検出器の
出力信号とから相対伸び率を演算する相対伸び率演算器
である。
An embodiment of the present invention will be described below with reference to the drawings. 8th
In the figure, (1) is the object to be measured, that is, a strip, (IA
) is a distance signal of the strip, and (2) is a distance measuring device for measuring the distance from the distance measuring device to the strip. A plurality of distance measuring devices are installed in the width direction on the strip at a predetermined interval from the strip. (I
s) is a low-pass filter that cuts the high frequency of the distance signal of the belt-shaped object output from the distance measuring device, and (3) calculates the arc length of the output signal of the low-pass filter that cuts the high frequency of the distance signal of the belt-shaped object. an arc length calculator; (6) is a minimum value detector that detects the minimum value of the arc length signals of a plurality of arc length calculators;
(7) is a relative elongation rate calculator that calculates a relative elongation rate from the arc length signal from the arc length calculator and the output signal of the minimum value detector.

次に本発明の動作について説明する。Next, the operation of the present invention will be explained.

前述のように帯状体の変位Δy1は(1)式のようにし
て時刻t1時刻t+Δtにおける距離測定器から帯状体
までの距離Yi+ yi+1の差で求められるが、実際
には、移動する帯状体が振動し、第4図の如く帯状体(
1)と帯状体の距離信号(IA)との間に大きな測定誤
差が生じる。
As mentioned above, the displacement Δy1 of the band-shaped body is determined by the difference between the distance Yi+yi+1 from the distance measuring device to the band-shaped body at time t1 and time t+Δt using equation (1), but in reality, the displacement Δy1 of the band-shaped body is It vibrates, and as shown in Figure 4, the band-shaped body (
A large measurement error occurs between 1) and the distance signal (IA) of the strip.

本発明は、この移動する帯状体の振動を除去するため距
離信号をローパスフィルタに通す。ローパスフィルタ処
理の一実施例を以下に上げる。
In the present invention, the distance signal is passed through a low-pass filter in order to remove vibrations of the moving band. An example of low-pass filter processing is given below.

時刻t99時刻+Δtにおける距離信号yI、yi+1
のローパスフィルタ通過後の値をガ・五十1とする・・
・・・・ (7) ・・・・・・ (8) のように求める。よって帯状体の変位Δ隔はΔ)’i 
=yt −Yi+1            °°(9
)で求められる。さらに従来技術と同様にして、時刻t
から時刻t+Δtの間に移動した帯状体の長さΔSiと
、はインド0からポイントnまで移動した帯状体の長さ
Sは、以下のようにして求められる。
Distance signal yI, yi+1 at time t99 time +Δt
Let the value after passing through the low-pass filter be 51...
...... (7) ...... (8) Calculate as follows. Therefore, the displacement Δ distance of the strip is Δ)'i
=yt −Yi+1 °°(9
). Furthermore, in the same manner as in the prior art, time t
The length ΔSi of the belt-shaped body moved from time t+Δt to time t+Δt, and the length S of the belt-shaped body moved from India 0 to point n are determined as follows.

x8i =  (xxl 3” + (ayi )” 
   −Q。
x8i = (xxl 3" + (ayi)"
-Q.

以上のような手順によって帯状体上の板巾の複数箇所で
、移動した帯状体の長さ8が求められる。
Through the above-described procedure, the length 8 of the moved strip is determined at a plurality of locations along the width of the strip.

帯状体上の板巾の複数箇所で求められた帯状体の長さS
の最小値8m1nは、測定箇所で最も平坦に近い箇所で
ある。そこでこの最小値8mInを基準として相対伸び
率β′を求めると、 となる。帯状体のうねりは帯状体上の複数箇所で共通変
動であるため、最小値8m1nを基準とすることによっ
て、この共通の変動を除することができ6゜ また帯状体上の板巾の複数箇所で求められた帯状体の長
さSの最大値Brnaxは、測定箇所で最も形状不良の
大きい箇所である。そこでこの最大値Brn*xを基準
として相対伸び率β“を求めると、となる。相対伸び率
β“はβ′と同様にして、帯状体上の複数箇所で共通の
変動である帯状体のうねりを除去することができる。
Length S of the strip obtained at multiple points of the board width on the strip
The minimum value of 8m1n is the closest to flatness among the measurement points. Therefore, when the relative elongation rate β' is calculated using this minimum value of 8 mIn as a reference, it becomes as follows. Since the waviness of the strip is a common variation at multiple locations on the strip, this common variation can be removed by using the minimum value of 8m1n as a standard. The maximum value Brnax of the length S of the strip-like body determined by is the location where the shape defect is the largest among the measurement locations. Therefore, if we calculate the relative elongation rate β'' using this maximum value Brn*x as a reference, it becomes as follows.The relative elongation rate β'' is the same as β', and the relative elongation rate β'' is a common fluctuation at multiple locations on the band-shaped body. Waviness can be removed.

また、帯状体上の板巾の複数箇所で求められた帯状体の
長さSの平均値Smを基準として相対伸び率βを求める
と、 となる。相対伸び率βは、lと同様にして帯状体上の複
数箇所で共通の変動である帯状体のうねりを除去するこ
とができる。
Moreover, when the relative elongation rate β is determined based on the average value Sm of the length S of the strip-shaped body determined at a plurality of locations of the board width on the strip-shaped body, the following is obtained. Similarly to l, the relative elongation rate β can eliminate the waviness of the strip, which is a common variation at multiple locations on the strip.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば帯状体の振動及びうね
りを除去するためにローバヌンイ〃りと最小値検出器を
付加したので1帯状体の振動及びうねりに影響されず形
状不良のみを検出する精度の高い平坦度検出装置が得ら
れるという効果がある。
As described above, according to the present invention, in order to remove the vibrations and waviness of the band-shaped body, a low bar number and a minimum value detector are added, so that only shape defects can be detected without being affected by the vibrations and waviness of the band-shaped body. This has the effect of providing a highly accurate flatness detection device.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例による平坦度検出装置のブロ
ック図、第2図は帯状体とその距離信号を示す説明図、
第8図は従来の平坦度検出装置のブロック図、第4図は
距離測定器と帯状体の距離信号を示す説明図である。 図において(1)は被測定体、(IA)は被測定体の距
離信号、(2)は距離測定器、(3)は弧長演算器、(
4)は伸び率演算器、(5)はローパスフィルタ、(6
)は最小値検出器、(7)は相対伸び率演算器。 なお、図中、同一符号は同一、又は相当部分を示す。
FIG. 1 is a block diagram of a flatness detection device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram showing a strip and its distance signal,
FIG. 8 is a block diagram of a conventional flatness detection device, and FIG. 4 is an explanatory diagram showing a distance measuring device and a distance signal of a strip. In the figure, (1) is the object to be measured, (IA) is the distance signal of the object to be measured, (2) is the distance measuring device, (3) is the arc length calculator, (
4) is an elongation rate calculator, (5) is a low-pass filter, (6
) is the minimum value detector, and (7) is the relative elongation rate calculator. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (3)

【特許請求の範囲】[Claims] (1)距離測定器から帯状体までの距離を測定する複数
台の距離測定器と、この複数台の距離測定器によつて測
定された距離信号の高周波をカットする複数台のローパ
スフィルタと、ローパスフィルタによつて高周波成分を
カットされた距離信号の弧長を演算する複数台の弧長演
算器と、複数台の弧長演算器によつて演算された弧長信
号の最小値を検出する最小値検出器と、各チャンネルの
弧長信号と弧長信号の最小値信号から、相対伸び率を演
算する相対伸び率演算器とから構成されたことを特徴と
する平坦度検出装置。
(1) A plurality of distance measuring devices that measure the distance from the distance measuring device to the strip, and a plurality of low-pass filters that cut high frequencies of distance signals measured by the plurality of distance measuring devices; Multiple arc length calculators calculate the arc length of the distance signal whose high frequency components have been cut by a low-pass filter, and detect the minimum value of the arc length signal calculated by the multiple arc length calculators. A flatness detection device comprising: a minimum value detector; and a relative elongation rate calculator that calculates a relative elongation rate from the arc length signal of each channel and the minimum value signal of the arc length signal.
(2)複数台の弧長演算器によつて演算された弧長信号
の最小値を検出する最小値検出器の代わりに複数台の弧
長演算器によつて演算された弧長信号の最大値を検出す
る最大値検出器を有することを特徴とする特許請求の範
囲第1項記載の平坦度検出装置。
(2) The maximum value of the arc length signal calculated by multiple arc length calculators instead of the minimum value detector that detects the minimum value of the arc length signals calculated by multiple arc length calculators. 2. The flatness detection device according to claim 1, further comprising a maximum value detector for detecting a value.
(3)複数台の弧長演算器によつて演算された弧長信号
の最小値を検出する最小値検出器の代わりに、複数台の
弧長演算器によつて演算された弧長信号の平均値を検出
する平均値検出器を有することを特徴とする特許請求の
範囲第1項記載の平坦度検出装置。
(3) Instead of a minimum value detector that detects the minimum value of the arc length signal calculated by multiple arc length calculation units, the minimum value detector detects the minimum value of the arc length signal calculated by multiple arc length calculation units. 2. The flatness detection device according to claim 1, further comprising an average value detector for detecting an average value.
JP60020475A 1985-02-05 1985-02-05 Flatness detector Granted JPS61178608A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60020475A JPS61178608A (en) 1985-02-05 1985-02-05 Flatness detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60020475A JPS61178608A (en) 1985-02-05 1985-02-05 Flatness detector

Publications (2)

Publication Number Publication Date
JPS61178608A true JPS61178608A (en) 1986-08-11
JPH0414728B2 JPH0414728B2 (en) 1992-03-13

Family

ID=12028133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60020475A Granted JPS61178608A (en) 1985-02-05 1985-02-05 Flatness detector

Country Status (1)

Country Link
JP (1) JPS61178608A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120206A (en) * 1986-11-10 1988-05-24 Koomei Kogyo Kk Apparatus for judging strain of tile
JPS63188707A (en) * 1987-02-02 1988-08-04 Koomei Kogyo Kk Method for deciding strain of tile
JPH03249514A (en) * 1990-02-28 1991-11-07 Nkk Corp Flatness measuring instrument
JPH04143608A (en) * 1990-10-05 1992-05-18 Nkk Corp Device for measuring flatness of steel plate
JPH04148817A (en) * 1990-10-11 1992-05-21 Mitsubishi Kasei Corp Surface inspecting apparatus
JP2006208370A (en) * 2004-12-28 2006-08-10 Non-Destructive Inspection Co Ltd Surface displacement measuring method and surface displacement measuring apparatus used for the same
TWI826779B (en) * 2021-04-23 2023-12-21 達運精密工業股份有限公司 Method of inspecting flatness of substrate

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4690727B2 (en) * 2005-01-06 2011-06-01 新日本製鐵株式会社 Optical shape measurement method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104705A (en) * 1979-01-29 1980-08-11 Nippon Kokan Kk <Nkk> Measuring method for shape of metal strip
JPS5963508A (en) * 1982-10-04 1984-04-11 Ishikawajima Harima Heavy Ind Co Ltd Apparatus for measuring descaling state of steel plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104705A (en) * 1979-01-29 1980-08-11 Nippon Kokan Kk <Nkk> Measuring method for shape of metal strip
JPS5963508A (en) * 1982-10-04 1984-04-11 Ishikawajima Harima Heavy Ind Co Ltd Apparatus for measuring descaling state of steel plate

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120206A (en) * 1986-11-10 1988-05-24 Koomei Kogyo Kk Apparatus for judging strain of tile
JPS63188707A (en) * 1987-02-02 1988-08-04 Koomei Kogyo Kk Method for deciding strain of tile
JPH03249514A (en) * 1990-02-28 1991-11-07 Nkk Corp Flatness measuring instrument
JPH04143608A (en) * 1990-10-05 1992-05-18 Nkk Corp Device for measuring flatness of steel plate
JPH04148817A (en) * 1990-10-11 1992-05-21 Mitsubishi Kasei Corp Surface inspecting apparatus
JP2006208370A (en) * 2004-12-28 2006-08-10 Non-Destructive Inspection Co Ltd Surface displacement measuring method and surface displacement measuring apparatus used for the same
TWI826779B (en) * 2021-04-23 2023-12-21 達運精密工業股份有限公司 Method of inspecting flatness of substrate

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