JPH0674755A - Flatness measuring apparatus - Google Patents
Flatness measuring apparatusInfo
- Publication number
- JPH0674755A JPH0674755A JP4247166A JP24716692A JPH0674755A JP H0674755 A JPH0674755 A JP H0674755A JP 4247166 A JP4247166 A JP 4247166A JP 24716692 A JP24716692 A JP 24716692A JP H0674755 A JPH0674755 A JP H0674755A
- Authority
- JP
- Japan
- Prior art keywords
- longitudinal direction
- unevenness
- steepness
- strip
- longitudinal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、搬送される圧延材等
の帯状体の平坦度を測定する平坦度測定装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flatness measuring device for measuring flatness of a belt-shaped body such as a rolled material being conveyed.
【０００２】[0002]
【従来の技術】図７は例えば特開昭６１−１７８６０８
号公報に示された従来の平坦度測定装置を示すブロック
図であり、図において、１は長手方向に一定速度Ｖで移
動する帯状体、２はこの帯状体１の上方に幅方向に配置
された複数の距離測定器で、各距離測定器２は、一定時
間Δｔ毎に帯状体１の表面までの距離Ｙを測定する。３
は距離測定器２からの距離信号を平滑化するローパスフ
イルタ、４は帯状体１の後述する弧長を求める弧長演算
器、５は帯状体１の幅方向の各位置（各箇所）で測定さ
れた移動距離Ｌ1 ，Ｌ2 ，…，Ｌn のうち最小の移動距
離Ｌmin を検出する最小値検出器、６は弧長演算器４の
演算結果および最小値検出器５の出力にもとづいて各幅
方向位置の各伸び率β1 〜βn 、つまり帯状体１の後述
する平坦度を算出する平坦度演算器である。2. Description of the Related Art FIG. 7 shows, for example, JP-A-61-178608.
FIG. 1 is a block diagram showing a conventional flatness measuring device disclosed in Japanese Patent Laid-Open Publication No. 1993-163, in which 1 is a strip that moves at a constant velocity V in the longitudinal direction, and 2 is a width direction above the strip 1. Each of the plurality of distance measuring devices 2 measures the distance Y to the surface of the band-shaped body 1 at regular time intervals Δt. Three
Is a low-pass filter for smoothing the distance signal from the distance measuring device 4, 4 is an arc length calculator for obtaining an arc length of the strip 1 described later, and 5 is measured at each position (each position) in the width direction of the strip 1. A minimum value detector for detecting the minimum movement distance L min among the calculated movement distances L 1 , L 2 , ..., L n , 6 is based on the calculation result of the arc length calculator 4 and the output of the minimum value detector 5. Is a flatness calculator for calculating the respective elongations β 1 to β n at each position in the width direction, that is, the flatness of the strip 1 described later.
【０００３】次に動作について説明する。図９は帯状体
１の平坦度不良をもった例を示す。一般的に同図（ａ）
の例１は帯状体１の幅方向の両エッジ部に波が大きく耳
波と言われる。同図（ｂ）の例２は帯状体１の幅方向の
中央部に波が大きく中のびと言われる。この波の大き
さ、すなわち平坦度量を表わす方法として、伸び率又は
急峻度の定義がよく知られている。Next, the operation will be described. FIG. 9 shows an example in which the strip 1 has poor flatness. Generally, the same figure (a)
In Example 1, the waves are large at both edge portions in the width direction of the strip 1 and are called ear waves. In Example 2 of FIG. 2B, the wave is large in the central portion of the strip 1 in the width direction, and it is said that the wave is centered. As a method of expressing the magnitude of this wave, that is, the amount of flatness, the definition of elongation or steepness is well known.
【０００４】図１０は急峻度の定義を示す。急峻度α
は、帯状体１の長手方向の波ピッチＰと波高値Ｈとの比
によって（１）式で定義される。 α＝Ｈ／Ｐ ・・・・・（１）FIG. 10 shows the definition of steepness. Steepness α
Is defined by the equation (1) by the ratio of the wave pitch P in the longitudinal direction of the strip 1 and the wave height value H. α = H / P (1)
【０００５】図１１は伸び率の定義を示す。伸び率βは
帯状体１の長手方向の弧長Ｓと測定区間Ｌとの比によっ
て（２）式で定義される。 β＝（Ｓ−Ｌ）／Ｌ ・・・・（２）FIG. 11 shows the definition of elongation. The elongation rate β is defined by the equation (2) by the ratio of the arc length S in the longitudinal direction of the strip 1 and the measurement section L. β = (S−L) / L ... (2)
【０００６】図７において、まず、距離測定器２は移動
する帯状体１の各位置における、距離測定器２から帯状
体１までの距離を測定する。この測定された距離信号は
各ローパスフイルタ３に入力されて高周波の雑音成分が
除去された後、弧長演算器４に入力される。この弧長演
算器４では、図８に示すように、時刻ｔi と一定時間Δ
ｔ経過後の時刻ｔi+1 における距離Ｙi ，Ｙi+1 、およ
び該当時間Δｔ内の移動距離ΔＸi （＝Ｖ・Δｔ）から
（３）式に基づいて該当距離ΔＸi における帯状体１の
表面の長さ、すなわち弧長ΔＳi が算出される。In FIG. 7, first, the distance measuring device 2 measures the distance from the distance measuring device 2 to the strip 1 at each position of the moving strip 1. The measured distance signal is input to each low pass filter 3 to remove high frequency noise components, and then input to the arc length calculator 4. In the arc length calculator 4, as shown in FIG. 8, the time t i and a predetermined time Δ
From the distances Y i and Y i + 1 at time t i + 1 after the elapse of t and the moving distance ΔX i (= V · Δt) within the corresponding time Δt based on the equation (3), the strip at the corresponding distance ΔX i The length of the surface of 1, that is, the arc length ΔS i is calculated.
【０００７】[0007]
【数１】 [Equation 1]
【０００８】したがって、帯状体１が長手方向にａ点か
らｂ点までの距離Ｌだけ移動した場合におけるその距離
Ｌに対応する全体の弧長Ｓは、Ｌ＝（ｎ−１）ΔＸi と
すると、（４）式で示される。Therefore, when the strip 1 moves in the longitudinal direction by the distance L from the point a to the point b, the total arc length S corresponding to the distance L is L = (n-1) ΔX i. , (4).
【０００９】[0009]
【数２】 [Equation 2]
【００１０】よって、距離Ｌだけ移動した場合の伸び率
βは、（２）式の定義に従って各伸び率演算器６におい
て算出される。以上の手法を用いて幅方向の各位置にお
ける各伸び率β1 〜βn が求まる。Therefore, the elongation rate β when moving by the distance L is calculated by each elongation rate calculator 6 according to the definition of the equation (2). The elongation rates β 1 to β n at each position in the width direction can be obtained using the above method.
【００１１】なお、測定された伸び率から帯状体１の大
きなうねりによる要因を排除するために、幅方向の各位
置で測定された移動距離Ｌ1 ，Ｌ2 ，…，Ｌn のうちの
最小移動距離Ｌmin を用い、（５）式に従って各幅方向
位置の各伸び率β1 〜βn 、つまり平坦度を算出する。 β＝（Ｓ−Ｌmin ）／Ｌmin ・・・・（５） なお、上記ローパスフイルタ３は測定された距離信号に
含まれる高周波の雑音成分を、上記のように除去する機
能を有している。In order to eliminate the factor due to the large undulation of the strip 1 from the measured elongation, the minimum of the moving distances L 1 , L 2 , ..., L n measured at each position in the width direction. Using the moving distance L min , the elongation percentages β 1 to β n at each position in the width direction, that is, the flatness is calculated according to the equation (5). β = (S−L min ) / L min (5) The low-pass filter 3 has a function of removing high-frequency noise components included in the measured distance signal as described above. There is.
【００１２】[0012]
【発明が解決しようとする課題】従来の平坦度測定装置
は以上のように構成されているので、例えば、製鉄所に
おける熱間圧延ラインにおいて、ローラコンベア上を連
続移動している圧延材の平坦度を測定する場合において
は、測定対象となる帯状体１は絶えず上下左右に振動し
ながら移動するので、測定された平坦度にこの振動に起
因する誤差が混入するほか、この搬送に伴って発生する
振動を完全に防止することは困難であるところから、平
坦度の測定度を例えば上下振動の振幅以下に向上させる
ことは不可能であるなどの問題点があった。Since the conventional flatness measuring apparatus is constructed as described above, for example, in a hot rolling line in a steel mill, the flatness of a rolled material continuously moving on a roller conveyor is flattened. When measuring the degree, the strip 1 to be measured constantly moves while vibrating up and down, left and right, so that errors caused by this vibration are mixed into the measured flatness, and also occur along with this conveyance. Since it is difficult to completely prevent such vibrations, there has been a problem that it is impossible to improve the degree of flatness measurement to, for example, the amplitude of vertical vibration or less.
【００１３】また、距離測定器２から出力される距離信
号に含まれる上記振動に起因する振動成分を、例えばロ
ーパスフイルタ等で除去することが考えられるが、上下
振動の周期と測定時間間隔Δｔとが近似すると測定でき
ないので、帯状体１の移動速度を低下しなければならな
いなどの問題点があった。Further, it is conceivable to remove the vibration component due to the vibration contained in the distance signal output from the distance measuring device 2 by a low-pass filter or the like, but the cycle of the vertical vibration and the measurement time interval Δt. However, there is a problem in that the moving speed of the band-shaped body 1 has to be reduced because the measurement cannot be performed if the above is approximate.
【００１４】この発明は上記のような問題点を解消する
ためになされたものであり、長手方向の凹凸量を測定す
ることによって被測定体としての帯状体の上下振動の要
因を確実に排除でき、平坦度の測定精度を大幅に向上で
きる平坦度測定装置を得ることを目的とする。The present invention has been made to solve the above-mentioned problems, and by measuring the amount of unevenness in the longitudinal direction, it is possible to reliably eliminate the factor of vertical vibration of the belt-shaped body as the object to be measured. An object of the present invention is to obtain a flatness measuring device capable of significantly improving the measurement accuracy of flatness.
【００１５】[0015]
【課題を解決するための手段】請求項１の発明に係る平
坦度測定装置は複数の長手方向凹凸量演算器を幅方向に
設け、各演算器から得られた、長手方向の凹凸量を演算
し抽出すると共に、その偏差を求めることにより、急峻
度を演算するようにしたものである。A flatness measuring apparatus according to a first aspect of the present invention is provided with a plurality of longitudinal direction unevenness amount calculators in the width direction, and calculates the unevenness amount in the longitudinal direction obtained from each calculator. Then, the steepness is calculated by extracting the deviation and calculating the deviation.
【００１６】請求項２の発明に係る平坦度測定装置は、
複数の長手方向凹凸量演算器幅方向に設け、各演算器か
ら得られた、長手方向の凹凸量を演算し抽出すると共
に、その偏差を求めることにより伸び率を演算するよう
にしたものである。A flatness measuring device according to the invention of claim 2 is
A plurality of longitudinal direction unevenness amount calculators are provided in the width direction, and the unevenness amount in the longitudinal direction obtained from each calculator is calculated and extracted, and the elongation is calculated by obtaining the deviation thereof. .
【００１７】請求項３の発明に係る平坦度測定装置は、
帯状体の長手方向に設置された、複数台の距離測定器か
ら、長手方向の凹凸量を抽出することにより急峻度を演
算するようにしたものである。A flatness measuring device according to the invention of claim 3 is
The steepness is calculated by extracting the unevenness amount in the longitudinal direction from a plurality of distance measuring devices installed in the longitudinal direction of the strip.
【００１８】請求項４の発明に係る平坦度測定装置は、
帯状体の長手方向に設置された、複数台の距離測定器か
ら、長手方向の凹凸量を抽出することにより伸び率を演
算するようにしたものである。The flatness measuring apparatus according to the invention of claim 4 is
The elongation percentage is calculated by extracting the amount of unevenness in the longitudinal direction from a plurality of distance measuring devices installed in the longitudinal direction of the strip.
【００１９】[0019]
【作用】請求項１の発明における平坦度測定装置は、搬
送される帯状体の上下振動及び回転振動の影響をまった
く受けずに、帯状体の急峻度の測定精度を大幅に向上さ
せると共に、モニタ表示に適した測定を行う。According to the flatness measuring device of the present invention, the accuracy of measuring the steepness of the strip is significantly improved without being affected by the vertical vibration and the rotational vibration of the transported strip, and the monitor can be used. Make measurements suitable for display.
【００２０】請求項２の発明における平坦度測定装置
は、搬送される帯状体の上下振動及び回転振動の影響を
まったく受けずに帯状体の伸び率の測定精度を大幅に向
上させると共に、形状制御に適した制御量を得る。According to the flatness measuring apparatus of the second aspect of the present invention, the accuracy of measuring the elongation of the strip is greatly improved without being affected by the vertical vibration and the rotational vibration of the transported strip, and the shape control is performed. To obtain a controlled variable suitable for.
【００２１】請求項３，４の発明における平坦度測定装
置は、搬送される帯状体の上下振動及び回転振動の影響
をまったく受けずに帯状体の急峻度、伸び率の測定精度
を大幅に向上させる。In the flatness measuring device according to the third and fourth aspects of the invention, the accuracy of measuring the steepness and elongation of the strip is greatly improved without being affected by vertical vibration and rotational vibration of the transported strip. Let
【００２２】[0022]
実施例１．以下、この発明の一実施例を図について説明
する。図１において、１は圧延材などの帯状体、１２
ａ，１２ｂ，１２ｃは長手方向凹凸測定器で、帯状体１
の幅方向に所定の間隔をおいて設置され、設置位置での
長手方向の凹凸を測定する。１３ａ，１３ｂ，１３ｃは
長手方向凹凸量演算器で、長手方向凹凸測定器１２ａ，
１２ｂ，１２ｃの測定結果から長手方向の凹凸量を演算
する。１４ａ，１４ｂ，１４ｃは積分器で、長手方向凹
凸量演算器１３ａ，１３ｂ，１３ｃの演算結果を搬送ピ
ッチ毎に積分する。１５ａ，１５ｂ，１５ｃは長手方向
急峻度演算器で積分器１４ａ，１４ｂ，１４ｃの演算結
果から長手方向の急峻度を演算する。１６は急峻度演算
器で、長手方向急峻度演算器１５ａ，１５ｂ，１５ｃの
演算結果から幅方向の偏差を演算し、急峻度を演算す
る。２２は帯状体１の搬送ピッチを検出して積分器１４
ａ，１４ｂ，１４ｃに加えるパルスジェネレータであ
る。Example 1. An embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, 1 is a strip-shaped body such as a rolled material, 12
Reference numerals a, 12b and 12c are longitudinal direction unevenness measuring devices, and the strip 1
It is installed at a predetermined interval in the width direction of and the unevenness in the longitudinal direction at the installation position is measured. Reference numerals 13a, 13b and 13c are longitudinal direction unevenness amount calculators, and longitudinal direction unevenness measuring device 12a,
The unevenness amount in the longitudinal direction is calculated from the measurement results of 12b and 12c. Reference numerals 14a, 14b, and 14c denote integrators, which integrate the calculation results of the longitudinal unevenness amount calculators 13a, 13b, and 13c for each transport pitch. Reference numerals 15a, 15b and 15c denote longitudinal steepness calculators which calculate longitudinal steepness from the calculation results of the integrators 14a, 14b and 14c. A steepness calculator 16 calculates a deviation in the width direction from the calculation results of the longitudinal steepness calculators 15a, 15b, 15c to calculate steepness. Reference numeral 22 denotes the integrator 14 by detecting the conveyance pitch of the strip 1.
It is a pulse generator added to a, 14b, and 14c.
【００２３】図２は長手方向凹凸量抽出部分の構成例を
示す構成図である。図２において、１７は光源で、帯状
体１上に長手方向のスリット状の光１７ａを照射する。
１８は２次元カメラで、帯状体１上に照射されるスリッ
ト光１７ａを幅方向の所定の角度から撮像する。２次元
カメラ１８の撮像する映像には帯状体１に凹凸がある
と、帯状体１に照射されるスリット光１７ａの帯状体１
の凹凸に対応した変化が表われる。長手方向凹凸量演算
器１３ａは２次元カメラ１８からの画像情報から長手方
向の凹凸量を演算し抽出する。２３は２次元カメラ１８
の画像情報を表示するモニタである。なお、長手方向凹
凸測定器１２ｂ，１２ｃも長手方向凹凸測定器１２ａと
同様に構成されている。FIG. 2 is a block diagram showing a structural example of a portion for extracting the unevenness in the longitudinal direction. In FIG. 2, reference numeral 17 denotes a light source, which irradiates the strip 1 with slit-shaped light 17a in the longitudinal direction.
Reference numeral 18 denotes a two-dimensional camera, which images the slit light 17a irradiated on the strip 1 from a predetermined angle in the width direction. If the strip 1 has irregularities in the image captured by the two-dimensional camera 18, the strip 1 of the slit light 17a irradiated on the strip 1 is formed.
A change corresponding to the unevenness of is shown. The longitudinal direction unevenness amount calculator 13a calculates and extracts the unevenness amount in the longitudinal direction from the image information from the two-dimensional camera 18. 23 is a two-dimensional camera 18
It is a monitor that displays image information of. The longitudinal direction unevenness measuring devices 12b and 12c are also configured similarly to the longitudinal direction unevenness measuring device 12a.
【００２４】次に動作について説明する。まず、帯状体
１上に設置された距離測定器（図示せず）にて、帯状体
１の表面までの距離を測定したと仮定すると、搬送され
る帯状体１までの距離測定結果Ｆ（ｘ，ｔ）は（６）式
で表わされる。 Ｆ（ｘ，ｔ）＝Ｆ（ｘ）＋ｘ・Ｒ（＋）＋Ｖ（ｔ）・・・（６） ここで、Ｆ（ｘ，ｔ）は距離測定結果 Ｆ（ｘ）は帯状体１の長手方向の位置ｘに対する高さの
関数 ｘは帯状体１の長手方向の位置 ｔは計測時刻 ｘ・Ｒ（ｔ）は位置ｘに対する振動であって、位置ｘに
よって異なる振動は回転すなわち不規則な振動を示す。 Ｖ（＋）は上下振動成分 （６）式の両辺を位置ｘで２階微分すると、Next, the operation will be described. First, assuming that the distance to the surface of the strip 1 is measured by a distance measuring device (not shown) installed on the strip 1, the distance measurement result F (x , T) is expressed by equation (6). F (x, t) = F (x) + x · R (+) + V (t) (6) where F (x, t) is the distance measurement result F (x) is the length of the strip 1. A function of height with respect to a position x in the direction x is a position in the longitudinal direction of the strip 1 t is a measurement time x · R (t) is a vibration with respect to the position x, and vibrations that differ depending on the position x are rotational or irregular vibrations Indicates. V (+) is the vertical vibration component When both sides of equation (6) are differentiated by the second order at the position x,
【００２５】[0025]
【数３】 [Equation 3]
【００２６】となる。（７）式は距離測定結果Ｆ（ｘ，
ｔ）を位置ｘにおいて２階微分することにより、振動成
分、回転成分に影響されないことを示す。すなわち、２
階微分とは物理的には凹凸量のことであり、凹凸量を直
接測定すれば振動成分、回転成分に影響されないことを
意味する。さらに（７）式を、ｘで積分すると[0026] Equation (7) is the distance measurement result F (x,
It is shown that t) is not influenced by the vibration component and the rotation component by performing the second-order differentiation at the position x. Ie 2
The differential is physically the amount of unevenness, which means that if the amount of unevenness is directly measured, it is not affected by vibration components and rotation components. Further, if the equation (7) is integrated with x,
【００２７】[0027]
【数４】 [Equation 4]
【００２８】となる。一方、平坦度の量を表わす、長手
方向の急峻度αは（１）式で定義される。従って、図３
において、長手方向の急峻度αは（９），（１０）式で
表わされる。[0028] On the other hand, the steepness α in the longitudinal direction, which represents the amount of flatness, is defined by the equation (1). Therefore, FIG.
In, the steepness α in the longitudinal direction is expressed by equations (9) and (10).
【００２９】[0029]
【数５】 [Equation 5]
【００３０】ここで、（１０）式は位置ｘの関数Ｆ
（ｘ）の微分値の平均値の絶対値の２分の１を示す。図
３は（９）式，（１０）式の物理的意味を示す。長手方
向の急峻度の幅方向に対する偏差は、最小値αmin を基
準として、（１１）式で表わされる。Here, the equation (10) is the function F of the position x.
It shows one half of the absolute value of the average value of the differential values of (x). FIG. 3 shows the physical meaning of the expressions (9) and (10). The deviation of the steepness in the longitudinal direction from the width direction is expressed by the equation (11) with the minimum value α min as a reference.
【００３１】[0031]
【数６】 [Equation 6]
【００３２】従って、（７）式の通り、長手方向凹凸測
定器１２ａ，１２ｂ，１２ｃからの信号から、長手方向
凹凸量演算器１３ａ，１３ｂ，１３ｃにて凹凸量を演算
する。次に、（８）式の通り、積分器１４ａ，１４ｂ，
１４ｃにて積分される。次に、（１０）式の通り、長手
方向急峻度演算器１５ａ，１５ｂ，１５ｃにて演算され
る。最後に（１１）式の通り、急峻度演算器１６にて演
算される。Therefore, according to the equation (7), the unevenness amount calculator 13a, 13b, 13c calculates the unevenness amount from the signals from the longitudinal unevenness measuring devices 12a, 12b, 12c. Next, as shown in equation (8), the integrators 14a, 14b,
It is integrated at 14c. Next, as shown in equation (10), the longitudinal steepness calculators 15a, 15b, and 15c calculate the values. Finally, as in equation (11), the steepness calculator 16 calculates.
【００３３】実施例２．次に、請求項２の発明の一実施
例について図４と共に説明する。図４においては図１と
対応する部分には同一符号を付して説明を省略する。１
９ａ，１９ｂ，１９ｃは長手方向伸び率演算器で積分器
１４ａ，１４ｂ，１４ｃの演算結果から長手方向の伸び
率を演算する。２０は伸び率演算器で、長手方向伸び率
演算器１９ａ，１９ｂ，１９ｃから幅方向の偏差を演算
し、伸び率を演算する。Example 2. Next, an embodiment of the invention of claim 2 will be described with reference to FIG. In FIG. 4, portions corresponding to those in FIG. 1
Reference numerals 9a, 19b, and 19c are longitudinal elongation rate calculators that calculate the elongation rate in the longitudinal direction from the calculation results of the integrators 14a, 14b, and 14c. Reference numeral 20 denotes an elongation rate calculator which calculates the deviation in the width direction from the longitudinal direction elongation rate calculators 19a, 19b and 19c to calculate the elongation rate.
【００３４】次に動作について説明する。平坦度の量を
表わす長手方向の伸び率βは（２）式で定義される。図
５において、長手方向の伸び率βは（１２）式で表わさ
れる。Next, the operation will be described. The elongation rate β in the longitudinal direction, which represents the amount of flatness, is defined by equation (2). In FIG. 5, the elongation rate β in the longitudinal direction is expressed by equation (12).
【００３５】[0035]
【数７】 [Equation 7]
【００３６】上記１２（式）の右辺の弧長Ｓは（１３）
式で表わされる。The arc length S on the right side of the above 12 (expression) is (13)
It is represented by a formula.
【００３７】[0037]
【数８】 [Equation 8]
【００３８】（１３）式を（１２）式に代入すると、Substituting equation (13) into equation (12),
【００３９】[0039]
【数９】 [Equation 9]
【００４０】となる。ここで、（１４）式は位置ｘの関
数Ｆ（ｘ）の微分値の２乗の積分の１／２を掛けたもの
と測長区間Ｌとの比を示す。長手方向の伸び率βの幅方
向に対する偏差は最小値βmin を基準として（１５）式
で表わされる。It becomes Here, the equation (14) shows the ratio of the product of the integral of the square of the derivative of the function F (x) at the position x multiplied by 1/2 and the length measurement section L. The deviation of the elongation rate β in the longitudinal direction from the width direction is expressed by the equation (15) with the minimum value β min as a reference.
【００４１】[0041]
【数１０】 [Equation 10]
【００４２】従って、実施例１の（１０）式の代わりに
（１４）式を用いると、この（１４）式で示す通り、長
手方向の伸び率が長手方向伸び率演算器１９ａ，１９
ｂ，１９ｃによって得られる。さらに、（１５）式の通
り、伸び率演算器２０にて伸び率が得られる。Therefore, when the equation (14) is used instead of the equation (10) in the first embodiment, the elongation in the longitudinal direction is calculated by the equations (a) and (19) in the longitudinal direction as shown in the equation (14).
b, 19c. Furthermore, the elongation rate is obtained by the elongation rate calculator 20 as in the equation (15).
【００４３】実施例３．次に、請求項３の発明の一実施
例について図６と共に説明する。図６において、２１は
距離測定器で、所定の基準位置から帯状体１上面までの
距離を測定する。この距離測定器２１は帯状体１の長手
方向に所定の間隔をおいて複数台（３台以上）設置さ
れ、その距離信号を長手方向凹凸量演算器１３ａに加え
る。他の部分の構成は図１と同様に構成されている。Example 3. Next, an embodiment of the invention of claim 3 will be described with reference to FIG. In FIG. 6, 21 is a distance measuring device, which measures the distance from a predetermined reference position to the upper surface of the strip 1. A plurality of (three or more) distance measuring devices 21 are installed at predetermined intervals in the longitudinal direction of the strip 1 and the distance signals are applied to the longitudinal direction unevenness amount calculator 13a. The structure of the other parts is the same as that of FIG.
【００４４】次に動作について説明する。（７）式の代
わりに、帯状体１の長手方向に設置された３台の距離測
定器２１の測定結果から（１６）式を演算する。Next, the operation will be described. Instead of the expression (7), the expression (16) is calculated from the measurement results of the three distance measuring devices 21 installed in the longitudinal direction of the strip 1.
【００４５】[0045]
【数１１】 [Equation 11]
【００４６】（１６）式の通り、長手方向凹凸量演算器
１３ａ，１３ｂ，１３ｃによって演算することにより、
長手方向の凹凸量が得られる。以下、実施例１，２と同
様にして、急峻度が得られる。According to the equation (16), by calculating with the longitudinal direction unevenness amount calculators 13a, 13b, 13c,
The amount of unevenness in the longitudinal direction can be obtained. Thereafter, the steepness is obtained in the same manner as in the first and second embodiments.
【００４７】実施例４．請求項４の発明の一実施例にお
いては、図６の長手方向急峻度演算器１５ａ，１５ｂ，
１５ｃ及び急峻度演算器１６の代わりに、図４の長手方
向伸び率演算器１９ａ，１９ｂ，１９ｃ及び伸び率演算
器２０を用いる。これにより実施例３と同様にして伸び
率を得ることができる。Example 4. In an embodiment of the invention of claim 4, in the longitudinal steepness calculators 15a, 15b of FIG.
Instead of 15c and the steepness calculator 16, the longitudinal elongation calculators 19a, 19b, 19c and the elongation calculator 20 of FIG. 4 are used. Thereby, the elongation rate can be obtained in the same manner as in Example 3.
【００４８】実施例５．上記実施例３，４では、長手方
向凹凸測定器の代わりに複数台（３台以上）の距離測定
器を用いる例について示したが、この長手方向凹凸測定
器の代わりに、複数台（２台以上）の傾き測定器を用い
てもよい。Example 5. In Examples 3 and 4 described above, an example in which a plurality of (three or more) distance measuring devices are used in place of the longitudinal direction unevenness measuring device has been shown. However, instead of this longitudinal direction unevenness measuring device, a plurality of (two) The above inclination measuring instrument may be used.
【００４９】[0049]
【発明の効果】以上のように、請求項１の発明によれ
ば、長手方向凹凸量演算器から得られる長手方向の凹凸
量を抽出することにより、急峻度を演算するように構成
したので、搬送される帯状体の上下振動及び回転振動の
影響をまったく受けることがなくこのため、帯状体の急
峻度の測定精度を大幅に向上できるという効果がある。
また、急峻度は人間の感覚にマッチしている平坦度量で
あるため、モニタ表示に適しており、画面表示により平
坦度を観察できる効果がある。As described above, according to the first aspect of the present invention, the steepness is calculated by extracting the longitudinal unevenness amount obtained from the longitudinal unevenness calculator. Since there is no influence of vertical vibration and rotational vibration of the conveyed belt-shaped body, there is an effect that the accuracy of measuring the steepness of the belt-shaped body can be significantly improved.
Further, since the steepness is the amount of flatness that matches the human sense, it is suitable for monitor display and has the effect of observing the flatness on the screen display.
【００５０】また、請求項２の発明によれば、長手方向
凹凸量演算器から得られた、長手方向の凹凸量を抽出す
ることにより伸び率を演算するように構成したので、搬
送される帯状体の上下振動及び回転振動の影響をまった
く受けることがなくこのため帯状体の伸び率の測定精度
を大幅に向上できるという効果がある。また急峻度は人
間の感覚にマッチした平坦度量であるため、モニタ表示
として使用できるが、帯状体の形状を正弦波として定義
しているため、正弦波以外の形状に対しては誤差を含
む。一方、伸び率は帯状体の形状が正弦波以外の形状で
も定義されるため、正弦波以外の形状でも誤差を含まな
い。従って、形状制御に適した制御量を得ることができ
る効果がある。Further, according to the second aspect of the invention, since the elongation rate is calculated by extracting the unevenness amount in the longitudinal direction obtained from the unevenness amount calculator for longitudinal direction, the strip shape to be conveyed. Since there is no influence of vertical vibration and rotational vibration of the body, there is an effect that the accuracy of measuring the elongation rate of the strip can be significantly improved. Further, since the steepness is a flatness amount that matches the human sense, it can be used as a monitor display, but since the shape of the band is defined as a sine wave, an error is included in shapes other than the sine wave. On the other hand, the elongation rate is defined even when the shape of the strip is a shape other than the sine wave, and therefore, the shape other than the sine wave does not include an error. Therefore, there is an effect that a control amount suitable for shape control can be obtained.
【００５１】請求項３の発明によれば、帯状体の長手方
向に設置された、複数台の距離測定器から、長手方向の
凹凸量を抽出することにより、急峻度を演算するように
構成したので、搬送される帯状体の上下振動及び回転振
動の影響をまったく受けることがなく、このため、帯状
体の急峻度の測定精度を大幅に向上できるという効果が
ある。また、１台の長手方向凹凸測定器の代わりに、複
数台の距離測定器を用いることで、長手方向凹凸測定器
１台での測定範囲には限界があることから、複数倍の測
定範囲にすることが可能であるという効果がある。さら
に測定範囲と測定精度は一般に逆比例の関係にあること
から、大幅に測定精度を向上できるという効果がある。According to the third aspect of the invention, the steepness is calculated by extracting the unevenness amount in the longitudinal direction from a plurality of distance measuring devices installed in the longitudinal direction of the strip. Therefore, there is no effect of vertical vibration and rotational vibration of the conveyed belt-shaped body, and therefore, there is an effect that the measurement accuracy of the steepness of the belt-shaped body can be significantly improved. In addition, by using a plurality of distance measuring devices instead of one longitudinal direction unevenness measuring device, the measuring range of one longitudinal direction unevenness measuring device is limited. The effect is that it is possible to do. Further, since the measurement range and the measurement accuracy are generally in inverse proportion to each other, there is an effect that the measurement accuracy can be significantly improved.
【００５２】請求項４の発明によれば、帯状体の長手方
向に設置された、複数台の距離測定器から、長手方向の
凹凸量を抽出することにより、伸び率を演算するように
構成したので、搬送される帯状体の上下振動及び回転振
動の影響をまったく受けることがなく、このため、帯状
体の伸び率の測定精度を大幅に向上できるという効果が
ある。また、１台の長手方向凹凸測定器の代わりに、複
数台の距離測定器を用いることで、長手方向凹凸測定器
１台での測定範囲には限界があることから、複数倍の測
定範囲にすることが可能であるという効果がある。さら
に測定範囲と測定精度は一般に逆比例の関係にあること
から、大幅に測定精度を向上できるという効果がある。According to the invention of claim 4, the elongation percentage is calculated by extracting the unevenness amount in the longitudinal direction from a plurality of distance measuring devices installed in the longitudinal direction of the strip. Therefore, there is no effect of vertical vibration and rotational vibration of the conveyed belt-like body, and therefore, there is an effect that the measurement accuracy of the elongation rate of the belt-like body can be significantly improved. In addition, by using a plurality of distance measuring devices instead of one longitudinal direction unevenness measuring device, the measuring range of one longitudinal direction unevenness measuring device is limited. The effect is that it is possible to do. Further, since the measurement range and the measurement accuracy are generally in inverse proportion to each other, there is an effect that the measurement accuracy can be significantly improved.
【図１】請求項１の発明の一実施例による平坦度測定装
置の構成を示すブロック図である。FIG. 1 is a block diagram showing a configuration of a flatness measuring apparatus according to an embodiment of the present invention.
【図２】この発明の実施例の長手方向凹凸量抽出部分を
示す構成図である。FIG. 2 is a configuration diagram showing a longitudinal direction unevenness amount extraction portion of an embodiment of the present invention.
【図３】急峻度演算の方法を示す構成図である。FIG. 3 is a configuration diagram showing a method of steepness calculation.
【図４】請求項２の発明の一実施例による平坦度測定装
置の構成を示すブロック図である。FIG. 4 is a block diagram showing a configuration of a flatness measuring device according to an embodiment of the invention of claim 2;
【図５】伸び率演算の方法を示す構成図である。FIG. 5 is a configuration diagram showing a method of calculating an elongation rate.
【図６】請求項３の発明の一実施例による平坦度測定装
置の構成を示すブロック図である。FIG. 6 is a block diagram showing a configuration of a flatness measuring device according to an embodiment of the invention of claim 3;
【図７】従来の平坦度測定装置を示すブロック図であ
る。FIG. 7 is a block diagram showing a conventional flatness measuring device.
【図８】図７による平坦度の測定原理を示す説明図であ
る。8 is an explanatory diagram showing the principle of measuring flatness according to FIG. 7. FIG.
【図９】帯状体の平坦度不良例を示す斜視図である。FIG. 9 is a perspective view showing an example of defective flatness of the strip.
【図１０】急峻度の定義を示す構成図である。FIG. 10 is a configuration diagram showing the definition of steepness.
【図１１】伸び率の定義を示す構成図である。FIG. 11 is a configuration diagram showing a definition of an elongation rate.
１ 帯状体１２ａ，１２ｂ，１２ｃ 長手方向凹凸測定
器 １３ａ，１３ｂ，１３ｃ 長手方向凹凸量演算器 １４ａ，１４ｂ，１４ｃ 積分器 １５ａ，１５ｂ，１５ｃ 長手方向急峻度演算器 １６ 急峻度演算器 １９ａ，１９ｂ，１９ｃ 長手方向伸び率演算器 ２０ 伸び率演算器 ２１ 距離測定器1 strip | belt-shaped body 12a, 12b, 12c Longitudinal direction unevenness measuring device 13a, 13b, 13c Longitudinal direction unevenness amount calculator 14a, 14b, 14c Integrator 15a, 15b, 15c Longitudinal steepness calculator 16 Steepness calculator 19a, 19b , 19c Longitudinal elongation rate calculator 20 Elongation rate calculator 21 Distance measuring instrument
Claims (4)
沿って配置され上記帯状体の上記長手方向の凹凸を測定
する複数の長手方向凹凸測定器と、上記各長手方向凹凸
測定器の出力からそれぞれ上記長手方向の凹凸量を演算
する複数の長手方向凹凸量演算器と、上記各長手方向凹
凸量演算器の出力をそれぞれ積分する複数の積分器と、
上記各積分器の出力からそれぞれ長手方向の急峻度を演
算する複数の長手方向急峻度演算器と、上記各長手方向
急峻度演算器の出力から上記幅方向の偏差を演算し急峻
度を求める急峻度演算器とを備えた平坦度測定装置。1. A plurality of longitudinal direction unevenness measuring devices, which are arranged along the width direction of a belt-shaped body conveyed in the longitudinal direction and measure the unevenness in the longitudinal direction of the belt-shaped body, and a plurality of the longitudinal direction unevenness measuring devices. A plurality of longitudinal direction unevenness amount computing unit that respectively calculates the unevenness amount in the longitudinal direction from the output, and a plurality of integrators that respectively integrate the outputs of the respective longitudinal direction unevenness amount computing units,
A plurality of longitudinal steepness calculators that respectively calculate the steepness in the longitudinal direction from the outputs of the integrators, and steepness that calculates the deviation in the width direction from the outputs of the longitudinal steepness calculators. A flatness measuring device equipped with a degree calculator.
沿って配置され上記帯状体の上記長手方向の凹凸を測定
する複数の長手方向凹凸測定器と、上記各長手方向凹凸
測定器の出力からそれぞれ上記長手方向の凹凸量を演算
する複数の長手方向凹凸量演算器と、上記各長手方向凹
凸量演算器の出力をそれぞれ積分する複数の積分器と、
上記各積分器の出力からそれぞれ長手方向の伸び率を演
算する複数の長手方向伸び率演算器と、上記各長手方向
伸び率演算器の出力から上記幅方向の偏差を演算し伸び
率を求める伸び率演算器とを備えた平坦度測定装置。2. A plurality of longitudinal direction unevenness measuring devices which are arranged along the width direction of a belt-shaped member conveyed in the longitudinal direction and which measure the unevenness in the longitudinal direction of the band-shaped member, and each of the longitudinal direction unevenness measuring devices. A plurality of longitudinal direction unevenness amount computing unit that respectively calculates the unevenness amount in the longitudinal direction from the output, and a plurality of integrators that respectively integrate the outputs of the respective longitudinal direction unevenness amount computing units,
A plurality of longitudinal direction elongation rate calculators for calculating the elongation rate in the longitudinal direction from the outputs of the respective integrators, and an elongation for obtaining the elongation rate by calculating the deviation in the width direction from the outputs of the respective longitudinal direction elongation rate calculators. A flatness measuring device including a rate calculator.
長手方向に沿って配置され上記帯状体表面までの距離を
測定する複数の距離測定器と、上記帯状体の幅方向に沿
って配置され上記帯状体の上記長手方向の凹凸を測定す
る複数の長手方向凹凸測定器と、上記各距離測定器の出
力から上記長手方向の凹凸量を演算する長手方向凹凸量
演算器と、上記各長手方向凹凸測定器の出力からそれぞ
れ長手方向の凹凸量を演算する複数の長手方向凹凸量演
算器と、上記各長手方向凹凸量演算器の出力をそれぞれ
積分する複数の積分器と、上記各積分器の出力からそれ
ぞれ長手方向の急峻度を演算する複数の長手方向急峻度
演算器と、上記各長手方向急峻度演算器の出力から上記
幅方向の偏差を演算し急峻度を求める急峻度演算器とを
備えた平坦度測定装置。3. A plurality of distance measuring devices, which are arranged along the longitudinal direction above the strip to be conveyed in the longitudinal direction and measure a distance to the surface of the strip, and arranged along the width direction of the strip. A plurality of longitudinal direction unevenness measuring device for measuring the longitudinal unevenness of the strip, a longitudinal direction unevenness amount calculator for calculating the longitudinal unevenness amount from the output of each distance measuring device, and each lengthwise A plurality of longitudinal direction unevenness amount calculators that respectively calculate the amount of unevenness in the longitudinal direction from the output of the direction unevenness measurer, a plurality of integrators that respectively integrate the outputs of the respective longitudinal direction unevenness amount calculators, and the respective integrators And a plurality of longitudinal steepness calculators that respectively calculate the steepness in the longitudinal direction from the outputs of the above, and a steepness calculator that calculates the deviation in the width direction from the outputs of the longitudinal steepness calculators to obtain the steepness. Flatness measurement device with Place
長手方向に沿って配置され上記帯状体表面までの距離を
測定する複数の距離測定器と、上記帯状体の幅方向に沿
って配置され上記帯状体の上記長手方向の凹凸を測定す
る複数の長手方向凹凸測定器と、上記各距離測定器の出
力から上記長手方向の凹凸量を演算する長手方向凹凸量
演算器と、上記各長手方向凹凸測定器の出力からそれぞ
れ上記長手方向の凹凸量を演算する複数の長手方向凹凸
量演算器と、上記各長手方向凹凸量演算器の出力をそれ
ぞれ積分する複数の積分器と、上記各積分器の出力から
それぞれ長手方向の伸び率を演算する複数の長手方向伸
び率演算器と、上記各長手方向伸び率演算器の出力から
上記幅方向の偏差を演算し急峻度を求める伸び率演算器
とを備えた平坦度測定装置。4. A plurality of distance measuring devices, which are arranged along the longitudinal direction above the strip to be conveyed in the longitudinal direction and measure a distance to the surface of the strip, and arranged along the width direction of the strip. A plurality of longitudinal direction unevenness measuring device for measuring the longitudinal unevenness of the strip, a longitudinal direction unevenness amount calculator for calculating the longitudinal unevenness amount from the output of each distance measuring device, and each lengthwise A plurality of longitudinal direction unevenness amount calculators that respectively calculate the longitudinal direction unevenness amount from the output of the direction unevenness measuring device, a plurality of integrators that respectively integrate the outputs of the respective longitudinal direction unevenness amount calculators, and the respective integrations. A plurality of longitudinal direction elongation rate calculators for calculating the longitudinal direction elongation rate from the output of each device, and an elongation rate calculator for calculating the widthwise deviation from the outputs of the respective longitudinal direction elongation rate calculators to obtain the steepness Flatness measurement with and Stationary device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4247166A JP2763459B2 (en) | 1992-08-25 | 1992-08-25 | Flatness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4247166A JP2763459B2 (en) | 1992-08-25 | 1992-08-25 | Flatness measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0674755A true JPH0674755A (en) | 1994-03-18 |
| JP2763459B2 JP2763459B2 (en) | 1998-06-11 |
Family
ID=17159423
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4247166A Expired - Lifetime JP2763459B2 (en) | 1992-08-25 | 1992-08-25 | Flatness measuring device |
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| Country | Link |
|---|---|
| JP (1) | JP2763459B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012032271A (en) * | 2010-07-30 | 2012-02-16 | Kobe Steel Ltd | Measuring apparatus |
| JP2012252017A (en) * | 2012-08-24 | 2012-12-20 | Toshiba Mitsubishi-Electric Industrial System Corp | Shape measurement device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI826779B (en) * | 2021-04-23 | 2023-12-21 | 達運精密工業股份有限公司 | Method of inspecting flatness of substrate |
-
1992
- 1992-08-25 JP JP4247166A patent/JP2763459B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012032271A (en) * | 2010-07-30 | 2012-02-16 | Kobe Steel Ltd | Measuring apparatus |
| JP2012252017A (en) * | 2012-08-24 | 2012-12-20 | Toshiba Mitsubishi-Electric Industrial System Corp | Shape measurement device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2763459B2 (en) | 1998-06-11 |
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