JPS61178408A - 窒化ケイ素粉末の製造方法 - Google Patents

窒化ケイ素粉末の製造方法

Info

Publication number
JPS61178408A
JPS61178408A JP60019000A JP1900085A JPS61178408A JP S61178408 A JPS61178408 A JP S61178408A JP 60019000 A JP60019000 A JP 60019000A JP 1900085 A JP1900085 A JP 1900085A JP S61178408 A JPS61178408 A JP S61178408A
Authority
JP
Japan
Prior art keywords
silicon nitride
gas
nitride powder
silicon
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60019000A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536363B2 (enrdf_load_stackoverflow
Inventor
San Abe
賛 安部
Masahiro Ogawa
正宏 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP60019000A priority Critical patent/JPS61178408A/ja
Priority to DE19863602647 priority patent/DE3602647A1/de
Priority to US06/825,571 priority patent/US4719095A/en
Publication of JPS61178408A publication Critical patent/JPS61178408A/ja
Publication of JPH0536363B2 publication Critical patent/JPH0536363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP60019000A 1985-02-02 1985-02-02 窒化ケイ素粉末の製造方法 Granted JPS61178408A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60019000A JPS61178408A (ja) 1985-02-02 1985-02-02 窒化ケイ素粉末の製造方法
DE19863602647 DE3602647A1 (de) 1985-02-02 1986-01-29 Herstellung von siliziumkeramik-pulvern
US06/825,571 US4719095A (en) 1985-02-02 1986-02-03 Production of silicon ceramic powders

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60019000A JPS61178408A (ja) 1985-02-02 1985-02-02 窒化ケイ素粉末の製造方法

Publications (2)

Publication Number Publication Date
JPS61178408A true JPS61178408A (ja) 1986-08-11
JPH0536363B2 JPH0536363B2 (enrdf_load_stackoverflow) 1993-05-28

Family

ID=11987273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60019000A Granted JPS61178408A (ja) 1985-02-02 1985-02-02 窒化ケイ素粉末の製造方法

Country Status (1)

Country Link
JP (1) JPS61178408A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023282136A1 (ja) 2021-07-05 2023-01-12 信越化学工業株式会社 一酸化珪素の製造方法
JP2023036398A (ja) 2021-09-02 2023-03-14 信越化学工業株式会社 一酸化珪素粉末及びリチウムイオン二次電池用負極活物質

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913611A (ja) * 1982-07-08 1984-01-24 Fumio Hori Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913611A (ja) * 1982-07-08 1984-01-24 Fumio Hori Ｓｉ↓３Ｎ↓４の超微粉の製造方法ならびに製造装置

Also Published As

Publication number Publication date
JPH0536363B2 (enrdf_load_stackoverflow) 1993-05-28

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