JPS61173113A - 磁気回転センサ - Google Patents
磁気回転センサInfo
- Publication number
- JPS61173113A JPS61173113A JP60012688A JP1268885A JPS61173113A JP S61173113 A JPS61173113 A JP S61173113A JP 60012688 A JP60012688 A JP 60012688A JP 1268885 A JP1268885 A JP 1268885A JP S61173113 A JPS61173113 A JP S61173113A
- Authority
- JP
- Japan
- Prior art keywords
- parallel
- sensing parts
- magnetic field
- thin film
- rotation sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 101100528473 Arabidopsis thaliana RMR4 gene Proteins 0.000 description 1
- 241000931705 Cicada Species 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60012688A JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60012688A JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61173113A true JPS61173113A (ja) | 1986-08-04 |
JPH0448175B2 JPH0448175B2 (enrdf_load_html_response) | 1992-08-06 |
Family
ID=11812313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60012688A Granted JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61173113A (enrdf_load_html_response) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0682268A (ja) * | 1991-02-28 | 1994-03-22 | Japan Servo Co Ltd | 磁気式位置検出装置 |
EP0924491A1 (fr) * | 1997-12-22 | 1999-06-23 | Brown & Sharpe Tesa S.A. | Circuit électronique pour dispositif de mesure magnétique, et procédé de mesure |
US6724186B2 (en) * | 2000-06-27 | 2004-04-20 | Brown & Sharpe Tesa Sa | Measuring device with magneto-resistive electrodes, and measuring method |
JP2005214920A (ja) * | 2004-02-02 | 2005-08-11 | Sankyo Seiki Mfg Co Ltd | 磁気センサ |
JP2009128301A (ja) * | 2007-11-27 | 2009-06-11 | Ckd Corp | 磁気リニア測定装置 |
WO2010150725A1 (ja) * | 2009-06-24 | 2010-12-29 | アルプス電気株式会社 | 磁気検出装置 |
DE102014111045A1 (de) | 2013-08-27 | 2015-03-05 | Tdk Corporation | Drehfeldsensor |
-
1985
- 1985-01-28 JP JP60012688A patent/JPS61173113A/ja active Granted
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0682268A (ja) * | 1991-02-28 | 1994-03-22 | Japan Servo Co Ltd | 磁気式位置検出装置 |
EP0924491A1 (fr) * | 1997-12-22 | 1999-06-23 | Brown & Sharpe Tesa S.A. | Circuit électronique pour dispositif de mesure magnétique, et procédé de mesure |
EP1052473A3 (fr) * | 1997-12-22 | 2000-11-29 | Brown & Sharpe Tesa S.A. | Dispositifs de mesure magnétique avec reduction de la dissipation d'énergie ou mode de veille |
US6724186B2 (en) * | 2000-06-27 | 2004-04-20 | Brown & Sharpe Tesa Sa | Measuring device with magneto-resistive electrodes, and measuring method |
JP2005214920A (ja) * | 2004-02-02 | 2005-08-11 | Sankyo Seiki Mfg Co Ltd | 磁気センサ |
JP2009128301A (ja) * | 2007-11-27 | 2009-06-11 | Ckd Corp | 磁気リニア測定装置 |
WO2010150725A1 (ja) * | 2009-06-24 | 2010-12-29 | アルプス電気株式会社 | 磁気検出装置 |
JP5066628B2 (ja) * | 2009-06-24 | 2012-11-07 | アルプス電気株式会社 | 磁気検出装置 |
EP2447674A4 (en) * | 2009-06-24 | 2017-05-17 | Alps Electric Co., Ltd. | Magnetic detection device |
DE102014111045A1 (de) | 2013-08-27 | 2015-03-05 | Tdk Corporation | Drehfeldsensor |
US10386169B2 (en) | 2013-08-27 | 2019-08-20 | Tdk Corporation | Rotating field sensor |
US10648787B2 (en) | 2013-08-27 | 2020-05-12 | Tdk Corporation | Rotating field sensor |
DE102014111045B4 (de) | 2013-08-27 | 2023-10-26 | Tdk Corporation | Drehfeldsensor |
Also Published As
Publication number | Publication date |
---|---|
JPH0448175B2 (enrdf_load_html_response) | 1992-08-06 |
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