JPS61169708A - パタ−ン検知方法とその装置 - Google Patents

パタ−ン検知方法とその装置

Info

Publication number
JPS61169708A
JPS61169708A JP60010418A JP1041885A JPS61169708A JP S61169708 A JPS61169708 A JP S61169708A JP 60010418 A JP60010418 A JP 60010418A JP 1041885 A JP1041885 A JP 1041885A JP S61169708 A JPS61169708 A JP S61169708A
Authority
JP
Japan
Prior art keywords
light
dark field
illumination spot
detection device
pattern detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60010418A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476405B2 (enrdf_load_stackoverflow
Inventor
Koji Oka
浩司 岡
Yushi Inagaki
雄史 稲垣
Masahito Nakajima
雅人 中島
Moritoshi Ando
護俊 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60010418A priority Critical patent/JPS61169708A/ja
Publication of JPS61169708A publication Critical patent/JPS61169708A/ja
Publication of JPH0476405B2 publication Critical patent/JPH0476405B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
JP60010418A 1985-01-22 1985-01-22 パタ−ン検知方法とその装置 Granted JPS61169708A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60010418A JPS61169708A (ja) 1985-01-22 1985-01-22 パタ−ン検知方法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60010418A JPS61169708A (ja) 1985-01-22 1985-01-22 パタ−ン検知方法とその装置

Publications (2)

Publication Number Publication Date
JPS61169708A true JPS61169708A (ja) 1986-07-31
JPH0476405B2 JPH0476405B2 (enrdf_load_stackoverflow) 1992-12-03

Family

ID=11749596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60010418A Granted JPS61169708A (ja) 1985-01-22 1985-01-22 パタ−ン検知方法とその装置

Country Status (1)

Country Link
JP (1) JPS61169708A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01134202A (ja) * 1987-11-20 1989-05-26 Fujitsu Ltd レーザ終点検出装置
US5448359A (en) * 1991-12-04 1995-09-05 Siemens Aktiengesellschaft Optical distance sensor

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120106A (ja) * 1982-01-12 1983-07-16 Hitachi Ltd 半導体ウエハの外観検査装置
JPS58151544A (ja) * 1982-03-05 1983-09-08 Nippon Jido Seigyo Kk 暗視野像による欠陥検査装置
JPS5977345A (ja) * 1982-10-27 1984-05-02 Toshiba Corp 表面きず検出方法
JPS59180315A (ja) * 1983-03-30 1984-10-13 Fujitsu Ltd スル−ホ−ル検査法
JPS59200908A (ja) * 1983-04-28 1984-11-14 Hitachi Ltd ウエハの照明方法およびその装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58120106A (ja) * 1982-01-12 1983-07-16 Hitachi Ltd 半導体ウエハの外観検査装置
JPS58151544A (ja) * 1982-03-05 1983-09-08 Nippon Jido Seigyo Kk 暗視野像による欠陥検査装置
JPS5977345A (ja) * 1982-10-27 1984-05-02 Toshiba Corp 表面きず検出方法
JPS59180315A (ja) * 1983-03-30 1984-10-13 Fujitsu Ltd スル−ホ−ル検査法
JPS59200908A (ja) * 1983-04-28 1984-11-14 Hitachi Ltd ウエハの照明方法およびその装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01134202A (ja) * 1987-11-20 1989-05-26 Fujitsu Ltd レーザ終点検出装置
US5448359A (en) * 1991-12-04 1995-09-05 Siemens Aktiengesellschaft Optical distance sensor

Also Published As

Publication number Publication date
JPH0476405B2 (enrdf_load_stackoverflow) 1992-12-03

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