JPS61167859A - 自動探傷走査装置 - Google Patents

自動探傷走査装置

Info

Publication number
JPS61167859A
JPS61167859A JP60006701A JP670185A JPS61167859A JP S61167859 A JPS61167859 A JP S61167859A JP 60006701 A JP60006701 A JP 60006701A JP 670185 A JP670185 A JP 670185A JP S61167859 A JPS61167859 A JP S61167859A
Authority
JP
Japan
Prior art keywords
scanning
frequency dividing
flaw detection
signal
dividing circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60006701A
Other languages
English (en)
Japanese (ja)
Other versions
JPH052103B2 (OSRAM
Inventor
Chishio Koshimizu
興水　地塩
Toshio Nonaka
野中　寿夫
Yasuo Hayakawa
泰夫 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP60006701A priority Critical patent/JPS61167859A/ja
Publication of JPS61167859A publication Critical patent/JPS61167859A/ja
Publication of JPH052103B2 publication Critical patent/JPH052103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP60006701A 1985-01-19 1985-01-19 自動探傷走査装置 Granted JPS61167859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60006701A JPS61167859A (ja) 1985-01-19 1985-01-19 自動探傷走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60006701A JPS61167859A (ja) 1985-01-19 1985-01-19 自動探傷走査装置

Publications (2)

Publication Number Publication Date
JPS61167859A true JPS61167859A (ja) 1986-07-29
JPH052103B2 JPH052103B2 (OSRAM) 1993-01-11

Family

ID=11645623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60006701A Granted JPS61167859A (ja) 1985-01-19 1985-01-19 自動探傷走査装置

Country Status (1)

Country Link
JP (1) JPS61167859A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63133058A (ja) * 1986-11-26 1988-06-04 Hitachi Constr Mach Co Ltd 超音波探傷装置
JPS63133057A (ja) * 1986-11-26 1988-06-04 Hitachi Constr Mach Co Ltd 超音波探傷装置
JPS63172960A (ja) * 1987-01-12 1988-07-16 Meidensha Electric Mfg Co Ltd セラミツク半導体基板の検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63133058A (ja) * 1986-11-26 1988-06-04 Hitachi Constr Mach Co Ltd 超音波探傷装置
JPS63133057A (ja) * 1986-11-26 1988-06-04 Hitachi Constr Mach Co Ltd 超音波探傷装置
JPS63172960A (ja) * 1987-01-12 1988-07-16 Meidensha Electric Mfg Co Ltd セラミツク半導体基板の検査装置

Also Published As

Publication number Publication date
JPH052103B2 (OSRAM) 1993-01-11

Similar Documents

Publication Publication Date Title
US3981184A (en) Ultrasonic diagnostic inspection systems
JPH04100251A (ja) プローブ装置
JP3142852B2 (ja) 表面欠陥検査装置
EP0102176A1 (en) Method and apparatus for ultrasonic flaw detection
KR890004884B1 (ko) 포토마스크 패턴 검사방법 및 장치
JPS62240856A (ja) 超音波探傷装置
US3820387A (en) Probe system for ultrasonic nondestructive testing
JPH0861949A (ja) 定盤及び研磨パッドの表面形状測定装置
JPS61167859A (ja) 自動探傷走査装置
US6414480B1 (en) Method and system for eddy current inspection calibration
JPH04207047A (ja) プローブ検査装置
US3751976A (en) Ultrasonic inspection system with pseudo isometric display
JPS6214058A (ja) 自動探傷走査装置
JPH07119717B2 (ja) 半導体材料評価装置
JPS60102553A (ja) 電子走査型超音波探傷装置
JPH0330448A (ja) 異物検査装置
JPS6220695B2 (OSRAM)
JP3491974B2 (ja) 試料移動方法及びその試料移動装置
KR102873562B1 (ko) 다중 측정 센서를 포함하는 나선형 스캔 장치 및 이를 이용한 웨이퍼 검사 방법
JPH1068716A (ja) 手動超音波探傷技量訓練装置
JP2582109B2 (ja) 超音波映像と他の映像との複合表示方法
JP2612351B2 (ja) 超音波検査装置
JPH0480604A (ja) 走査型トンネル顕微鏡及びこれを含むスルーホールメッキ検査装置
JPH0333061Y2 (OSRAM)
JPS6180076A (ja) Ｍｒ素子の検査装置