JPS6220695B2 - - Google Patents
Info
- Publication number
- JPS6220695B2 JPS6220695B2 JP57078641A JP7864182A JPS6220695B2 JP S6220695 B2 JPS6220695 B2 JP S6220695B2 JP 57078641 A JP57078641 A JP 57078641A JP 7864182 A JP7864182 A JP 7864182A JP S6220695 B2 JPS6220695 B2 JP S6220695B2
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- adapter
- probe
- prober
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P74/00—
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57078641A JPS58196029A (ja) | 1982-05-11 | 1982-05-11 | プロ−ブカ−ド切替装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57078641A JPS58196029A (ja) | 1982-05-11 | 1982-05-11 | プロ−ブカ−ド切替装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58196029A JPS58196029A (ja) | 1983-11-15 |
| JPS6220695B2 true JPS6220695B2 (OSRAM) | 1987-05-08 |
Family
ID=13667485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57078641A Granted JPS58196029A (ja) | 1982-05-11 | 1982-05-11 | プロ−ブカ−ド切替装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58196029A (OSRAM) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62263647A (ja) * | 1986-05-12 | 1987-11-16 | Tokyo Electron Ltd | ウエハプロ−バ |
| JP2547406B2 (ja) * | 1987-01-21 | 1996-10-23 | 東京エレクトロン株式会社 | 多品種測定装置 |
| JPS63185038A (ja) * | 1987-01-27 | 1988-07-30 | Nec Yamagata Ltd | 半導体用プロ−ビング装置 |
| JP2726899B2 (ja) * | 1988-06-27 | 1998-03-11 | 東京エレクトロン株式会社 | プローブ装置 |
| US5621313A (en) * | 1993-09-09 | 1997-04-15 | Tokyo Seimitsu Co., Ltd. | Wafer probing system and method that stores reference pattern and movement value data for different kinds of wafers |
-
1982
- 1982-05-11 JP JP57078641A patent/JPS58196029A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58196029A (ja) | 1983-11-15 |
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