JPS58196029A - プロ−ブカ−ド切替装置 - Google Patents

プロ−ブカ−ド切替装置

Info

Publication number
JPS58196029A
JPS58196029A JP57078641A JP7864182A JPS58196029A JP S58196029 A JPS58196029 A JP S58196029A JP 57078641 A JP57078641 A JP 57078641A JP 7864182 A JP7864182 A JP 7864182A JP S58196029 A JPS58196029 A JP S58196029A
Authority
JP
Japan
Prior art keywords
probe
cards
probe card
adapter
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57078641A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6220695B2 (OSRAM
Inventor
Toshimi Yasuda
安田　利美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57078641A priority Critical patent/JPS58196029A/ja
Publication of JPS58196029A publication Critical patent/JPS58196029A/ja
Publication of JPS6220695B2 publication Critical patent/JPS6220695B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57078641A 1982-05-11 1982-05-11 プロ−ブカ−ド切替装置 Granted JPS58196029A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57078641A JPS58196029A (ja) 1982-05-11 1982-05-11 プロ−ブカ−ド切替装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57078641A JPS58196029A (ja) 1982-05-11 1982-05-11 プロ−ブカ−ド切替装置

Publications (2)

Publication Number Publication Date
JPS58196029A true JPS58196029A (ja) 1983-11-15
JPS6220695B2 JPS6220695B2 (OSRAM) 1987-05-08

Family

ID=13667485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57078641A Granted JPS58196029A (ja) 1982-05-11 1982-05-11 プロ−ブカ−ド切替装置

Country Status (1)

Country Link
JP (1) JPS58196029A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62263647A (ja) * 1986-05-12 1987-11-16 Tokyo Electron Ltd ウエハプロ−バ
JPS63179267A (ja) * 1987-01-21 1988-07-23 Tokyo Electron Ltd 多品種測定装置
JPS63185038A (ja) * 1987-01-27 1988-07-30 Nec Yamagata Ltd 半導体用プロ−ビング装置
JPH028757A (ja) * 1988-06-27 1990-01-12 Tokyo Electron Ltd プローブ装置
US5621313A (en) * 1993-09-09 1997-04-15 Tokyo Seimitsu Co., Ltd. Wafer probing system and method that stores reference pattern and movement value data for different kinds of wafers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62263647A (ja) * 1986-05-12 1987-11-16 Tokyo Electron Ltd ウエハプロ−バ
JPS63179267A (ja) * 1987-01-21 1988-07-23 Tokyo Electron Ltd 多品種測定装置
JPS63185038A (ja) * 1987-01-27 1988-07-30 Nec Yamagata Ltd 半導体用プロ−ビング装置
JPH028757A (ja) * 1988-06-27 1990-01-12 Tokyo Electron Ltd プローブ装置
US5621313A (en) * 1993-09-09 1997-04-15 Tokyo Seimitsu Co., Ltd. Wafer probing system and method that stores reference pattern and movement value data for different kinds of wafers

Also Published As

Publication number Publication date
JPS6220695B2 (OSRAM) 1987-05-08

Similar Documents

Publication Publication Date Title
TWI432734B (zh) 於用以測試半導體裝置之系統中分享資源之技術
US3723867A (en) Apparatus having a plurality of multi-position switches for automatically testing electronic circuit boards
JPH09321102A (ja) 検査装置
US5736850A (en) Configurable probe card for automatic test equipment
JP3135378B2 (ja) 半導体試験装置
US3848188A (en) Multiplexer control system for a multi-array test probe assembly
JP5613333B2 (ja) モジュール式プローバおよびこのプローバの運転方法
IE970253A1 (en) Method for testing a plurality of integrated circuits on a¹semiconductor wafer
JP3215475B2 (ja) プローブ装置
US5751151A (en) Integrated circuit test apparatus
JPH05256911A (ja) 集積回路の入力および出力の電気パラメータの試験方法
JPS58196029A (ja) プロ−ブカ−ド切替装置
JPH06151531A (ja) プローブ装置
JP2008537593A (ja) ウエハのプローブ応用のアクティブ診断インターフェース
US6011405A (en) Apparatus and method for probing multiple integrated circuit dice in a semiconductor wafer
CN221039309U (zh) 一种晶圆的测试装置及半导体机台
US6693434B2 (en) Automated system for estimating ring oscillator reliability and testing AC response and method of operation thereof
US20150168482A1 (en) Configurable test equipment
CN115598493A (zh) 集成电路装置的检测系统、信号源及电源供应装置
WO2005106510A2 (en) Apparatus for high speed probing of flat panel displays
US20020145434A1 (en) Interconnect package cluster probe short removal apparatus and method
JP2735859B2 (ja) プローバ及びプロービング方法
KR100532757B1 (ko) 프로버 시스템과 웨이퍼의 불량 판별방법
JPH11354594A (ja) 半導体装置
JP3107798B2 (ja) 半導体デバイスの検査装置