JPS6116531A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS6116531A JPS6116531A JP13831684A JP13831684A JPS6116531A JP S6116531 A JPS6116531 A JP S6116531A JP 13831684 A JP13831684 A JP 13831684A JP 13831684 A JP13831684 A JP 13831684A JP S6116531 A JPS6116531 A JP S6116531A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tube
- nozzle
- hydrogen gas
- diluted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 26
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 23
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 239000007789 gas Substances 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 16
- 239000012159 carrier gas Substances 0.000 claims abstract description 12
- 239000010453 quartz Substances 0.000 claims abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 15
- 235000012431 wafers Nutrition 0.000 abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052710 silicon Inorganic materials 0.000 abstract description 7
- 239000010703 silicon Substances 0.000 abstract description 7
- 239000010409 thin film Substances 0.000 abstract description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 239000003085 diluting agent Substances 0.000 abstract description 2
- 229910001873 dinitrogen Inorganic materials 0.000 abstract description 2
- 239000006185 dispersion Substances 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13831684A JPS6116531A (ja) | 1984-07-03 | 1984-07-03 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13831684A JPS6116531A (ja) | 1984-07-03 | 1984-07-03 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6116531A true JPS6116531A (ja) | 1986-01-24 |
| JPH0123939B2 JPH0123939B2 (Direct) | 1989-05-09 |
Family
ID=15219042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13831684A Granted JPS6116531A (ja) | 1984-07-03 | 1984-07-03 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6116531A (Direct) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01205425A (ja) * | 1988-02-10 | 1989-08-17 | Tel Sagami Ltd | 酸化炉 |
| JPH01252809A (ja) * | 1987-09-01 | 1989-10-09 | Tel Sagami Ltd | 縦型酸化装置 |
| US4906595A (en) * | 1986-12-08 | 1990-03-06 | U.S. Philips Corporation | Method of manufacturing a semiconductor device, in which a silicon wafer is provided at its surface with field oxide regions |
| US5318776A (en) * | 1988-03-16 | 1994-06-07 | Lion Corporation | Composition for preventing graying of the hair |
| US5439676A (en) * | 1989-12-27 | 1995-08-08 | Lion Corporation | cAMP derivatives and use thereof for preventing or restoring grayed hair to its natural color |
-
1984
- 1984-07-03 JP JP13831684A patent/JPS6116531A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4906595A (en) * | 1986-12-08 | 1990-03-06 | U.S. Philips Corporation | Method of manufacturing a semiconductor device, in which a silicon wafer is provided at its surface with field oxide regions |
| JPH01252809A (ja) * | 1987-09-01 | 1989-10-09 | Tel Sagami Ltd | 縦型酸化装置 |
| JPH01205425A (ja) * | 1988-02-10 | 1989-08-17 | Tel Sagami Ltd | 酸化炉 |
| US5318776A (en) * | 1988-03-16 | 1994-06-07 | Lion Corporation | Composition for preventing graying of the hair |
| US5439676A (en) * | 1989-12-27 | 1995-08-08 | Lion Corporation | cAMP derivatives and use thereof for preventing or restoring grayed hair to its natural color |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0123939B2 (Direct) | 1989-05-09 |
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