JPS61164044U - - Google Patents
Info
- Publication number
- JPS61164044U JPS61164044U JP4769185U JP4769185U JPS61164044U JP S61164044 U JPS61164044 U JP S61164044U JP 4769185 U JP4769185 U JP 4769185U JP 4769185 U JP4769185 U JP 4769185U JP S61164044 U JPS61164044 U JP S61164044U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- flat surface
- spacers
- boat
- small diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Description
第１図は本考案の一実施例に係るサセプタに半
導体ウエハをセツトした状態を示す側面図、第２
図は同じく半導体ウエハを持上げた状態を示す側
面図、第３図は従来のプラズマＣＶＤ用ボートの
斜視図、第４図は従来のサセプタの構成を示す斜
視図である。
２１……サセプタ、２２，２３……スペーサ、
２２ａ，２３ａ……小径部、２４……ロツド。
FIG. 1 is a side view showing a state in which a semiconductor wafer is set in a susceptor according to an embodiment of the present invention;
3 is a perspective view of a conventional plasma CVD boat, and FIG. 4 is a perspective view of the structure of a conventional susceptor. 21... Susceptor, 22, 23... Spacer,
22a, 23a...small diameter portion, 24...rod.
Claims (1)
てなる半導体用ウエハ用ボートに於いて、平坦面
を有するサセプタと、このサセプタの平坦面に回
転自在に軸支され、かつ前記サセプタの平坦面と
の間に小径部を有し、この小径部と前記サセプタ
の平坦面との間に於いて前記半導体ウエハを保持
する１又は複数対のスペーサとを具備し、前記各
対のスペーサの小径部の少なくとも一方は非円形
であり、同スペーサの回転に伴い前記半導体ウエ
ハを前記サセプタの上端面より持上げることを特
徴とする半導体ウエハ用ボート。 In a boat for semiconductor wafers in which a plurality of susceptors are assembled with spacers interposed between the susceptor having a flat surface and the flat surface of the susceptor that is rotatably supported on the flat surface of the susceptor and the flat surface of the susceptor. and one or more pairs of spacers that hold the semiconductor wafer between the small diameter part and the flat surface of the susceptor, and at least one of the small diameter parts of each pair of spacers. A boat for semiconductor wafers, wherein the spacer is non-circular and lifts the semiconductor wafer from the upper end surface of the susceptor as the spacer rotates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4769185U JPS61164044U (en) | 1985-03-30 | 1985-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4769185U JPS61164044U (en) | 1985-03-30 | 1985-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164044U true JPS61164044U (en) | 1986-10-11 |
Family
ID=30563249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4769185U Pending JPS61164044U (en) | 1985-03-30 | 1985-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164044U (en) |
-
1985
- 1985-03-30 JP JP4769185U patent/JPS61164044U/ja active Pending