JPH02140840U - - Google Patents
Info
- Publication number
- JPH02140840U JPH02140840U JP4983389U JP4983389U JPH02140840U JP H02140840 U JPH02140840 U JP H02140840U JP 4983389 U JP4983389 U JP 4983389U JP 4983389 U JP4983389 U JP 4983389U JP H02140840 U JPH02140840 U JP H02140840U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- setting
- groove
- diffusion source
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の不純物拡散用石英ボートの実
施例を示す斜視図、第２図は本実施例ボートの一
部分を拡大して示す断面図、第３図は本実施例ボ
ートを炉管内に挿入した状態を示す配置図、第４
図は炉管の炉口を覆うためのエンドキヤツプを示
す概略図、第５図ａ，ｂ，ｃは各々４点支持構造
の石英ボートを示す斜視図、正面図及び側面図、
第６図ａ，ｂ，ｃは各々２点支持構造の石英ボー
トを示す斜視図、断面図及び一部分を拡大して示
す断面図、第７図は不純物拡散によつて得られる
特性変化を説明するためのグラフである。
１ａ……第１の支持バー、１ｂ……第２の支持
バー、３……半導体ウエハセツト用溝、４……固
体拡散源セツト用溝、５……半導体ウエハ、６…
…固体拡散源、θ１……半導体ウエハ及び固体拡
散源のセツト面の傾斜角度、θ２……半導体ウエ
ハセツト用溝と固体拡散源のセツト用溝とのなす
角度。
Fig. 1 is a perspective view showing an embodiment of the quartz boat for impurity diffusion of the present invention, Fig. 2 is an enlarged cross-sectional view of a part of the boat of this embodiment, and Fig. 3 is a perspective view showing the boat of this embodiment in a furnace tube. Layout diagram showing the inserted state, No. 4
The figure is a schematic diagram showing an end cap for covering the furnace mouth of the furnace tube, and Figures 5a, b, and c are perspective views, front views, and side views, respectively, showing a quartz boat with a four-point support structure.
Figures 6a, b, and c are respectively a perspective view, a cross-sectional view, and a partially enlarged cross-sectional view showing a quartz boat with a two-point support structure, and Figure 7 illustrates changes in characteristics obtained by impurity diffusion. This is a graph for 1a...First support bar, 1b...Second support bar, 3...Semiconductor wafer setting groove, 4...Solid diffusion source setting groove, 5...Semiconductor wafer, 6...
...Solid diffusion source, θ 1 ...Inclination angle of the setting surface of the semiconductor wafer and solid diffusion source, θ 2 ...Angle between the groove for setting the semiconductor wafer and the groove for setting the solid diffusion source.
Claims (1)
外周面の任意の２個所を支持する不純物拡散用石
英ボートにおいて、半導体ウエハ及び固体拡散源
のセツト面が炉管の水平面に対して傾斜している
と共に、半導体ウエハセツト用溝と固体拡散源セ
ツト用溝とが非平行に設けられていることを特徴
とする不純物拡散用石英ボート。 In a quartz boat for impurity diffusion in which a semiconductor wafer and a solid diffusion source are separated from each other and supported at two arbitrary points on the outer peripheral surface of each boat, the set surfaces of the semiconductor wafer and the solid diffusion source are inclined with respect to the horizontal plane of the furnace tube. 1. A quartz boat for impurity diffusion, characterized in that a groove for setting a semiconductor wafer and a groove for setting a solid diffusion source are provided non-parallelly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4983389U JPH02140840U (en) | 1989-04-27 | 1989-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4983389U JPH02140840U (en) | 1989-04-27 | 1989-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140840U true JPH02140840U (en) | 1990-11-26 |
Family
ID=31567862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4983389U Pending JPH02140840U (en) | 1989-04-27 | 1989-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140840U (en) |
-
1989
- 1989-04-27 JP JP4983389U patent/JPH02140840U/ja active Pending