JPS62154639U - - Google Patents
Info
- Publication number
- JPS62154639U JPS62154639U JP4185486U JP4185486U JPS62154639U JP S62154639 U JPS62154639 U JP S62154639U JP 4185486 U JP4185486 U JP 4185486U JP 4185486 U JP4185486 U JP 4185486U JP S62154639 U JPS62154639 U JP S62154639U
- Authority
- JP
- Japan
- Prior art keywords
- neck
- gas introduction
- introduction side
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 239000007800 oxidant agent Substances 0.000 claims 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Description
第１図はこの考案の酸化拡散装置の一実施例を
示す断面図、第２図および第３図は各々従来の炉
芯管構造を示す断面図である。
２２……炉芯管、２７……頚部、２８……混合
室。
FIG. 1 is a cross-sectional view showing one embodiment of the oxidation diffusion device of this invention, and FIGS. 2 and 3 are cross-sectional views each showing a conventional furnace core tube structure. 22... Furnace core tube, 27... Neck, 28... Mixing chamber.
Claims (1)
離寄つた部分を頚部とし、 該頚部と前記ガス導入側端部間に混合室を設け
た炉芯管 を有する酸化拡散装置。[Scope of Claim for Utility Model Registration] An oxidizer having a furnace core tube in which a neck is a part located a predetermined distance closer to the wafer installation area than the end on the gas introduction side, and a mixing chamber is provided between the neck and the end on the gas introduction side. Diffusion device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4185486U JPS62154639U (en) | 1986-03-24 | 1986-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4185486U JPS62154639U (en) | 1986-03-24 | 1986-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62154639U true JPS62154639U (en) | 1987-10-01 |
Family
ID=30857231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4185486U Pending JPS62154639U (en) | 1986-03-24 | 1986-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62154639U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03194924A (en) * | 1989-12-22 | 1991-08-26 | Tokyo Electron Sagami Ltd | Vertical processing equipment |
-
1986
- 1986-03-24 JP JP4185486U patent/JPS62154639U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03194924A (en) * | 1989-12-22 | 1991-08-26 | Tokyo Electron Sagami Ltd | Vertical processing equipment |