JPS6280327U - - Google Patents
Info
- Publication number
- JPS6280327U JPS6280327U JP17113485U JP17113485U JPS6280327U JP S6280327 U JPS6280327 U JP S6280327U JP 17113485 U JP17113485 U JP 17113485U JP 17113485 U JP17113485 U JP 17113485U JP S6280327 U JPS6280327 U JP S6280327U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- furnace
- fixing member
- fix
- rear end
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 5
Landscapes
- Furnace Details (AREA)
Description
第１図はこの考案の拡散炉の実施例を示す一部
断面図、第２図はその背面図、第３図はこの考案
の実施例の拡散炉に設置された反応管のキヤツプ
の開閉を示す図、第４図は従来の拡散炉を示す断
面図である。
２……炉本体、６……反応管、１６……固定部
材としての固定環、２４……断熱部材。
Fig. 1 is a partial sectional view showing an embodiment of the diffusion furnace of this invention, Fig. 2 is a rear view thereof, and Fig. 3 shows opening and closing of the reaction tube cap installed in the diffusion furnace of this invention. The figure shown in FIG. 4 is a sectional view showing a conventional diffusion furnace. 2... Furnace body, 6... Reaction tube, 16... Fixed ring as a fixed member, 24... Heat insulating member.
Claims (1)
る反応管の位置を固定する固定部材を取り付け、
この固定部材と前記反応管の端部との間に断熱部
材を介在させて前記反応管の位置を固定したこと
を特徴とする拡散炉。 (2) 前記固定部材は、前記炉本体の後端部材に
前記反応管の位置を調節可能に取り付けたことを
特徴とする実用新案登録請求の範囲第１項に記載
の拡散炉。[Claims for Utility Model Registration] (1) Attaching a fixing member to the rear end of the furnace body to fix the position of the reaction tube installed in the furnace body,
A diffusion furnace characterized in that a heat insulating member is interposed between the fixing member and the end of the reaction tube to fix the position of the reaction tube. (2) The diffusion furnace according to claim 1, wherein the fixing member is attached to the rear end member of the furnace main body so that the position of the reaction tube can be adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17113485U JPS6280327U (en) | 1985-11-07 | 1985-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17113485U JPS6280327U (en) | 1985-11-07 | 1985-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6280327U true JPS6280327U (en) | 1987-05-22 |
Family
ID=31106486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17113485U Pending JPS6280327U (en) | 1985-11-07 | 1985-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280327U (en) |
-
1985
- 1985-11-07 JP JP17113485U patent/JPS6280327U/ja active Pending