JPS61163547A - Ｘ線取り出し窓 - Google Patents

Ｘ線取り出し窓

Info

Publication number
JPS61163547A
JPS61163547A JP450585A JP450585A JPS61163547A JP S61163547 A JPS61163547 A JP S61163547A JP 450585 A JP450585 A JP 450585A JP 450585 A JP450585 A JP 450585A JP S61163547 A JPS61163547 A JP S61163547A
Authority
JP
Japan
Prior art keywords
ray
film
chamber
plasma
ray extraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP450585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0372183B2 (cg-RX-API-DMAC7.html
Inventor
Yasunao Saito
斉藤　保直
Ikuo Okada
岡田　育夫
Hideo Yoshihara
秀雄 吉原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP450585A priority Critical patent/JPS61163547A/ja
Publication of JPS61163547A publication Critical patent/JPS61163547A/ja
Publication of JPH0372183B2 publication Critical patent/JPH0372183B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith

Landscapes

  • Radiation-Therapy Devices (AREA)
  • X-Ray Techniques (AREA)
JP450585A 1985-01-14 1985-01-14 Ｘ線取り出し窓 Granted JPS61163547A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP450585A JPS61163547A (ja) 1985-01-14 1985-01-14 Ｘ線取り出し窓

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP450585A JPS61163547A (ja) 1985-01-14 1985-01-14 Ｘ線取り出し窓

Publications (2)

Publication Number Publication Date
JPS61163547A true JPS61163547A (ja) 1986-07-24
JPH0372183B2 JPH0372183B2 (cg-RX-API-DMAC7.html) 1991-11-15

Family

ID=11585907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP450585A Granted JPS61163547A (ja) 1985-01-14 1985-01-14 Ｘ線取り出し窓

Country Status (1)

Country Link
JP (1) JPS61163547A (cg-RX-API-DMAC7.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02253598A (ja) * 1989-03-27 1990-10-12 Nichicon Corp Ｘ線発生装置
JP2008506238A (ja) * 2004-07-09 2008-02-28 エナジェティック・テクノロジー・インコーポレーテッド 誘導駆動プラズマ光源
JP2011019675A (ja) * 2009-07-15 2011-02-03 Toshiba Corp 荷電粒子線照射装置
US7948185B2 (en) 2004-07-09 2011-05-24 Energetiq Technology Inc. Inductively-driven plasma light source
US8143790B2 (en) 2004-07-09 2012-03-27 Energetiq Technology, Inc. Method for inductively-driven plasma light source
JP2013024558A (ja) * 2011-07-14 2013-02-04 Hamamatsu Photonics Kk 電子線照射装置及び電子線透過ユニット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5782954A (en) * 1980-11-11 1982-05-24 Nec Corp X-ray window

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5782954A (en) * 1980-11-11 1982-05-24 Nec Corp X-ray window

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02253598A (ja) * 1989-03-27 1990-10-12 Nichicon Corp Ｘ線発生装置
JP2008506238A (ja) * 2004-07-09 2008-02-28 エナジェティック・テクノロジー・インコーポレーテッド 誘導駆動プラズマ光源
US7948185B2 (en) 2004-07-09 2011-05-24 Energetiq Technology Inc. Inductively-driven plasma light source
US8143790B2 (en) 2004-07-09 2012-03-27 Energetiq Technology, Inc. Method for inductively-driven plasma light source
JP2011019675A (ja) * 2009-07-15 2011-02-03 Toshiba Corp 荷電粒子線照射装置
JP2013024558A (ja) * 2011-07-14 2013-02-04 Hamamatsu Photonics Kk 電子線照射装置及び電子線透過ユニット

Also Published As

Publication number Publication date
JPH0372183B2 (cg-RX-API-DMAC7.html) 1991-11-15

Similar Documents

Publication Publication Date Title
CA1233918A (en) Filter apparatus for use with an x-ray source
US4523327A (en) Multi-color X-ray line source
US7652272B2 (en) Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
US4771447A (en) X-ray source
JPH0372184B2 (cg-RX-API-DMAC7.html)
JPH0745205A (ja) 電磁波駆動型スイッチ
US6888297B2 (en) Method and apparatus for debris mitigation for an electrical discharge source
JPS61163547A (ja) Ｘ線取り出し窓
EP0105261B1 (en) Providing x-rays
JPH0687408B2 (ja) プラズマｘ線発生装置
Pearlman et al. Bright discharge plasma sources for X-ray lithography
JPS61250948A (ja) Ｘ線発生装置およびｘ線露光法
TW202338483A (zh) 光源裝置
JPH01265443A (ja) Ｘ線露光装置
JPH08241847A (ja) 露光装置及び露光方法
JP2002510848A (ja) 電子トーチ型電子銃
JPS6176665A (ja) 蒸着膜形成装置
JPH0638391B2 (ja) Ｘ線露光装置
JPH01137543A (ja) レーザ励起ｘ線発生装置
JPS59163741A (ja) Ｘ線発生装置
JP3589278B2 (ja) ピンチプラズマの発生方法および装置
RU194199U1 (ru) Рентгеновский источник для литографии
JPS60225426A (ja) プラズマｘ線露光装置
JPS59108249A (ja) Ｘ線発生方法及びｘ線発生装置
JPS61237351A (ja) プラズマｘ線発生装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term