JPS61160747A - リソグラフイ−法及びリソグラフイ−用マスク保持体 - Google Patents

リソグラフイ−法及びリソグラフイ−用マスク保持体

Info

Publication number
JPS61160747A
JPS61160747A JP60001890A JP189085A JPS61160747A JP S61160747 A JPS61160747 A JP S61160747A JP 60001890 A JP60001890 A JP 60001890A JP 189085 A JP189085 A JP 189085A JP S61160747 A JPS61160747 A JP S61160747A
Authority
JP
Japan
Prior art keywords
film
mask holder
silicon
silicon oxide
silicon wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60001890A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0482049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hideo Kato
日出夫 加藤
Masaaki Matsushima
正明 松島
Keiko Matsuda
啓子 松田
Hirofumi Shibata
浩文 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60001890A priority Critical patent/JPS61160747A/ja
Priority to DE19863600169 priority patent/DE3600169A1/de
Publication of JPS61160747A publication Critical patent/JPS61160747A/ja
Priority to US07/170,688 priority patent/US4837123A/en
Publication of JPH0482049B2 publication Critical patent/JPH0482049B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60001890A 1985-01-07 1985-01-09 リソグラフイ−法及びリソグラフイ−用マスク保持体 Granted JPS61160747A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60001890A JPS61160747A (ja) 1985-01-09 1985-01-09 リソグラフイ−法及びリソグラフイ−用マスク保持体
DE19863600169 DE3600169A1 (de) 1985-01-07 1986-01-07 Maskenstruktur zur lithographie, verfahren zu ihrer herstellung und lithographisches verfahren
US07/170,688 US4837123A (en) 1985-01-07 1988-03-14 Mask structure for lithography, method of preparation thereof and lithographic method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60001890A JPS61160747A (ja) 1985-01-09 1985-01-09 リソグラフイ−法及びリソグラフイ−用マスク保持体

Publications (2)

Publication Number Publication Date
JPS61160747A true JPS61160747A (ja) 1986-07-21
JPH0482049B2 JPH0482049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-25

Family

ID=11514172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60001890A Granted JPS61160747A (ja) 1985-01-07 1985-01-09 リソグラフイ−法及びリソグラフイ−用マスク保持体

Country Status (1)

Country Link
JP (1) JPS61160747A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2641383A1 (fr) * 1988-12-30 1990-07-06 Technion Res & Dev Foundation Procede pour l'obtention des masques pour lithographie aux rayons x

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2641383A1 (fr) * 1988-12-30 1990-07-06 Technion Res & Dev Foundation Procede pour l'obtention des masques pour lithographie aux rayons x

Also Published As

Publication number Publication date
JPH0482049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-25

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