JPS61159110A - 質量流量制御装置 - Google Patents
質量流量制御装置Info
- Publication number
- JPS61159110A JPS61159110A JP59279116A JP27911684A JPS61159110A JP S61159110 A JPS61159110 A JP S61159110A JP 59279116 A JP59279116 A JP 59279116A JP 27911684 A JP27911684 A JP 27911684A JP S61159110 A JPS61159110 A JP S61159110A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- mass flow
- heat
- tube
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000007423 decrease Effects 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 17
- 235000006693 Cassia laevigata Nutrition 0.000 description 15
- 241000522641 Senna Species 0.000 description 15
- 229940124513 senna glycoside Drugs 0.000 description 15
- 230000000694 effects Effects 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59279116A JPS61159110A (ja) | 1984-12-29 | 1984-12-29 | 質量流量制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59279116A JPS61159110A (ja) | 1984-12-29 | 1984-12-29 | 質量流量制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61159110A true JPS61159110A (ja) | 1986-07-18 |
| JPH0325724B2 JPH0325724B2 (enrdf_load_stackoverflow) | 1991-04-08 |
Family
ID=17606642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59279116A Granted JPS61159110A (ja) | 1984-12-29 | 1984-12-29 | 質量流量制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61159110A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6286513U (enrdf_load_stackoverflow) * | 1985-11-20 | 1987-06-02 | ||
| JPH0214029U (enrdf_load_stackoverflow) * | 1988-07-11 | 1990-01-29 | ||
| US9527138B2 (en) | 2013-01-23 | 2016-12-27 | Hainbuch Gmbh Spannende Technik | Clamping device |
-
1984
- 1984-12-29 JP JP59279116A patent/JPS61159110A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6286513U (enrdf_load_stackoverflow) * | 1985-11-20 | 1987-06-02 | ||
| JPH0214029U (enrdf_load_stackoverflow) * | 1988-07-11 | 1990-01-29 | ||
| US9527138B2 (en) | 2013-01-23 | 2016-12-27 | Hainbuch Gmbh Spannende Technik | Clamping device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325724B2 (enrdf_load_stackoverflow) | 1991-04-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |