JPS61153351U - - Google Patents

Info

Publication number
JPS61153351U
JPS61153351U JP3731985U JP3731985U JPS61153351U JP S61153351 U JPS61153351 U JP S61153351U JP 3731985 U JP3731985 U JP 3731985U JP 3731985 U JP3731985 U JP 3731985U JP S61153351 U JPS61153351 U JP S61153351U
Authority
JP
Japan
Prior art keywords
oxide film
utility
counter electrode
high concentration
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3731985U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3731985U priority Critical patent/JPS61153351U/ja
Publication of JPS61153351U publication Critical patent/JPS61153351U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)

Description

【図面の簡単な説明】
第１図ａ〜ｅは、本考案の一実施例をその製造
工程順を示す構造断面図である。第２図ａ〜ｃは
従来のＭＯＳ容量をその製造工程順に示す構造断
面図である。 １……Ｎ型エピタキシヤル層、２，４，５……
酸化膜、３……Ｎ＋型領域、６……電極。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体基体の高濃度領域上に表面エツチングに
    よつて所定の厚さとした酸化膜を有し、この酸化
    膜上に対向電極を備えたＭＯＳ容量を有すること
    を特徴とする半導体装置。
JP3731985U 1985-03-15 1985-03-15 Pending JPS61153351U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3731985U JPS61153351U (ja) 1985-03-15 1985-03-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3731985U JPS61153351U (ja) 1985-03-15 1985-03-15

Publications (1)

Publication Number Publication Date
JPS61153351U true JPS61153351U (ja) 1986-09-22

Family

ID=30543294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3731985U Pending JPS61153351U (ja) 1985-03-15 1985-03-15

Country Status (1)

Country Link
JP (1) JPS61153351U (ja)

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