JPS61153273A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS61153273A
JPS61153273A JP59277927A JP27792784A JPS61153273A JP S61153273 A JPS61153273 A JP S61153273A JP 59277927 A JP59277927 A JP 59277927A JP 27792784 A JP27792784 A JP 27792784A JP S61153273 A JPS61153273 A JP S61153273A
Authority
JP
Japan
Prior art keywords
substrate
thin film
film
film forming
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59277927A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580552B2 (enExample
Inventor
Mieko Kofukada
小深田　美惠子
Toshiaki Kashihara
樫原　俊昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59277927A priority Critical patent/JPS61153273A/ja
Publication of JPS61153273A publication Critical patent/JPS61153273A/ja
Publication of JPH0580552B2 publication Critical patent/JPH0580552B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP59277927A 1984-12-26 1984-12-26 薄膜形成装置 Granted JPS61153273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59277927A JPS61153273A (ja) 1984-12-26 1984-12-26 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59277927A JPS61153273A (ja) 1984-12-26 1984-12-26 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS61153273A true JPS61153273A (ja) 1986-07-11
JPH0580552B2 JPH0580552B2 (enExample) 1993-11-09

Family

ID=17590222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59277927A Granted JPS61153273A (ja) 1984-12-26 1984-12-26 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS61153273A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4419874Y1 (enExample) * 1966-09-20 1969-08-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4419874Y1 (enExample) * 1966-09-20 1969-08-26

Also Published As

Publication number Publication date
JPH0580552B2 (enExample) 1993-11-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term