JPS61149339U - - Google Patents

Info

Publication number
JPS61149339U
JPS61149339U JP3250585U JP3250585U JPS61149339U JP S61149339 U JPS61149339 U JP S61149339U JP 3250585 U JP3250585 U JP 3250585U JP 3250585 U JP3250585 U JP 3250585U JP S61149339 U JPS61149339 U JP S61149339U
Authority
JP
Japan
Prior art keywords
reading device
automatic
semiconductor wafer
storage means
wafer prober
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3250585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3250585U priority Critical patent/JPS61149339U/ja
Publication of JPS61149339U publication Critical patent/JPS61149339U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3250585U 1985-03-07 1985-03-07 Pending JPS61149339U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3250585U JPS61149339U (enExample) 1985-03-07 1985-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3250585U JPS61149339U (enExample) 1985-03-07 1985-03-07

Publications (1)

Publication Number Publication Date
JPS61149339U true JPS61149339U (enExample) 1986-09-16

Family

ID=30534080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3250585U Pending JPS61149339U (enExample) 1985-03-07 1985-03-07

Country Status (1)

Country Link
JP (1) JPS61149339U (enExample)

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