JPS61147030A - 清浄作業台 - Google Patents

清浄作業台

Info

Publication number
JPS61147030A
JPS61147030A JP26837084A JP26837084A JPS61147030A JP S61147030 A JPS61147030 A JP S61147030A JP 26837084 A JP26837084 A JP 26837084A JP 26837084 A JP26837084 A JP 26837084A JP S61147030 A JPS61147030 A JP S61147030A
Authority
JP
Japan
Prior art keywords
blower
clean
air
partition wall
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26837084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0570051B2 (pt
Inventor
Keiichiro Oi
大井　慶一郎
Tatsuo Yoshitomi
吉富　達夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Techno Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Techno Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Techno Engineering Co Ltd
Priority to JP26837084A priority Critical patent/JPS61147030A/ja
Publication of JPS61147030A publication Critical patent/JPS61147030A/ja
Publication of JPH0570051B2 publication Critical patent/JPH0570051B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP26837084A 1984-12-21 1984-12-21 清浄作業台 Granted JPS61147030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26837084A JPS61147030A (ja) 1984-12-21 1984-12-21 清浄作業台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26837084A JPS61147030A (ja) 1984-12-21 1984-12-21 清浄作業台

Publications (2)

Publication Number Publication Date
JPS61147030A true JPS61147030A (ja) 1986-07-04
JPH0570051B2 JPH0570051B2 (pt) 1993-10-04

Family

ID=17457558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26837084A Granted JPS61147030A (ja) 1984-12-21 1984-12-21 清浄作業台

Country Status (1)

Country Link
JP (1) JPS61147030A (pt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004031928A (ja) * 2002-05-07 2004-01-29 Seiko Epson Corp 清浄作業台

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532066Y1 (pt) * 1967-04-27 1970-12-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532066Y1 (pt) * 1967-04-27 1970-12-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004031928A (ja) * 2002-05-07 2004-01-29 Seiko Epson Corp 清浄作業台
JP4513275B2 (ja) * 2002-05-07 2010-07-28 セイコーエプソン株式会社 清浄作業台

Also Published As

Publication number Publication date
JPH0570051B2 (pt) 1993-10-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees