JPS6114654B2 - - Google Patents

Info

Publication number
JPS6114654B2
JPS6114654B2 JP52066898A JP6689877A JPS6114654B2 JP S6114654 B2 JPS6114654 B2 JP S6114654B2 JP 52066898 A JP52066898 A JP 52066898A JP 6689877 A JP6689877 A JP 6689877A JP S6114654 B2 JPS6114654 B2 JP S6114654B2
Authority
JP
Japan
Prior art keywords
scanning
signal
wafer
mask
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52066898A
Other languages
English (en)
Japanese (ja)
Other versions
JPS542074A (en
Inventor
Juzo Kato
Ryozo Hiraga
Yasuo Ogino
Hideki Yoshinari
Masao Totsuka
Ichiro Kano
Akyoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6689877A priority Critical patent/JPS542074A/ja
Publication of JPS542074A publication Critical patent/JPS542074A/ja
Publication of JPS6114654B2 publication Critical patent/JPS6114654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP6689877A 1977-06-07 1977-06-07 Alignment unit Granted JPS542074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6689877A JPS542074A (en) 1977-06-07 1977-06-07 Alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6689877A JPS542074A (en) 1977-06-07 1977-06-07 Alignment unit

Publications (2)

Publication Number Publication Date
JPS542074A JPS542074A (en) 1979-01-09
JPS6114654B2 true JPS6114654B2 (enrdf_load_stackoverflow) 1986-04-19

Family

ID=13329200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6689877A Granted JPS542074A (en) 1977-06-07 1977-06-07 Alignment unit

Country Status (1)

Country Link
JP (1) JPS542074A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043657B2 (ja) * 1975-08-22 1985-09-30 株式会社日立製作所 物体状態検査方法

Also Published As

Publication number Publication date
JPS542074A (en) 1979-01-09

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