JPS542074A - Alignment unit - Google Patents

Alignment unit

Info

Publication number
JPS542074A
JPS542074A JP6689877A JP6689877A JPS542074A JP S542074 A JPS542074 A JP S542074A JP 6689877 A JP6689877 A JP 6689877A JP 6689877 A JP6689877 A JP 6689877A JP S542074 A JPS542074 A JP S542074A
Authority
JP
Japan
Prior art keywords
alignment unit
scanning lines
scanning
alignment
signl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6689877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6114654B2 (enrdf_load_stackoverflow
Inventor
Yuzo Kato
Ryozo Hiraga
Yasuo Ogino
Hideki Yoshinari
Masao Totsuka
Ichiro Kano
Akiyoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6689877A priority Critical patent/JPS542074A/ja
Publication of JPS542074A publication Critical patent/JPS542074A/ja
Publication of JPS6114654B2 publication Critical patent/JPS6114654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP6689877A 1977-06-07 1977-06-07 Alignment unit Granted JPS542074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6689877A JPS542074A (en) 1977-06-07 1977-06-07 Alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6689877A JPS542074A (en) 1977-06-07 1977-06-07 Alignment unit

Publications (2)

Publication Number Publication Date
JPS542074A true JPS542074A (en) 1979-01-09
JPS6114654B2 JPS6114654B2 (enrdf_load_stackoverflow) 1986-04-19

Family

ID=13329200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6689877A Granted JPS542074A (en) 1977-06-07 1977-06-07 Alignment unit

Country Status (1)

Country Link
JP (1) JPS542074A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225575A (en) * 1975-08-22 1977-02-25 Hitachi Ltd Inspection method of the state of object

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225575A (en) * 1975-08-22 1977-02-25 Hitachi Ltd Inspection method of the state of object

Also Published As

Publication number Publication date
JPS6114654B2 (enrdf_load_stackoverflow) 1986-04-19

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