JPS6114532A - 圧力センサの製造方法 - Google Patents

圧力センサの製造方法

Info

Publication number
JPS6114532A
JPS6114532A JP13551784A JP13551784A JPS6114532A JP S6114532 A JPS6114532 A JP S6114532A JP 13551784 A JP13551784 A JP 13551784A JP 13551784 A JP13551784 A JP 13551784A JP S6114532 A JPS6114532 A JP S6114532A
Authority
JP
Japan
Prior art keywords
pressure
receiving plate
base
pressure sensor
pressure receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13551784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533338B2 (enrdf_load_stackoverflow
Inventor
Hidefumi Saito
英文 斎藤
Yoshio Ashida
芦田　良雄
Osamu Tawara
修 田原
Hiroyoshi Mizuguchi
博義 水口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP13551784A priority Critical patent/JPS6114532A/ja
Publication of JPS6114532A publication Critical patent/JPS6114532A/ja
Publication of JPH0533338B2 publication Critical patent/JPH0533338B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP13551784A 1984-06-30 1984-06-30 圧力センサの製造方法 Granted JPS6114532A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13551784A JPS6114532A (ja) 1984-06-30 1984-06-30 圧力センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13551784A JPS6114532A (ja) 1984-06-30 1984-06-30 圧力センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6114532A true JPS6114532A (ja) 1986-01-22
JPH0533338B2 JPH0533338B2 (enrdf_load_stackoverflow) 1993-05-19

Family

ID=15153612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13551784A Granted JPS6114532A (ja) 1984-06-30 1984-06-30 圧力センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6114532A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009300336A (ja) * 2008-06-16 2009-12-24 Horiba Stec Co Ltd 静電容量型圧力センサ及びその製造方法
CN113432763A (zh) * 2021-06-17 2021-09-24 中北大学 夹芯式pvdf压力计真空环境压制装置及方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009300336A (ja) * 2008-06-16 2009-12-24 Horiba Stec Co Ltd 静電容量型圧力センサ及びその製造方法
CN113432763A (zh) * 2021-06-17 2021-09-24 中北大学 夹芯式pvdf压力计真空环境压制装置及方法

Also Published As

Publication number Publication date
JPH0533338B2 (enrdf_load_stackoverflow) 1993-05-19

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