JPS6113960Y2 - - Google Patents

Info

Publication number
JPS6113960Y2
JPS6113960Y2 JP9365379U JP9365379U JPS6113960Y2 JP S6113960 Y2 JPS6113960 Y2 JP S6113960Y2 JP 9365379 U JP9365379 U JP 9365379U JP 9365379 U JP9365379 U JP 9365379U JP S6113960 Y2 JPS6113960 Y2 JP S6113960Y2
Authority
JP
Japan
Prior art keywords
gas
reaction
purge gas
flow
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9365379U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5610841U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9365379U priority Critical patent/JPS6113960Y2/ja
Publication of JPS5610841U publication Critical patent/JPS5610841U/ja
Application granted granted Critical
Publication of JPS6113960Y2 publication Critical patent/JPS6113960Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
JP9365379U 1979-07-05 1979-07-05 Expired JPS6113960Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9365379U JPS6113960Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-05 1979-07-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9365379U JPS6113960Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-05 1979-07-05

Publications (2)

Publication Number Publication Date
JPS5610841U JPS5610841U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-01-29
JPS6113960Y2 true JPS6113960Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-30

Family

ID=29326560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9365379U Expired JPS6113960Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-07-05 1979-07-05

Country Status (1)

Country Link
JP (1) JPS6113960Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8821008B2 (en) * 2009-04-29 2014-09-02 Waters Technologies Corporation Simultaneous differential thermal analysis system

Also Published As

Publication number Publication date
JPS5610841U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-01-29

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