JPS6113950B2 - - Google Patents
Info
- Publication number
- JPS6113950B2 JPS6113950B2 JP53119585A JP11958578A JPS6113950B2 JP S6113950 B2 JPS6113950 B2 JP S6113950B2 JP 53119585 A JP53119585 A JP 53119585A JP 11958578 A JP11958578 A JP 11958578A JP S6113950 B2 JPS6113950 B2 JP S6113950B2
- Authority
- JP
- Japan
- Prior art keywords
- ferrite
- lap
- processing
- polishing
- processing method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 26
- 238000012545 processing Methods 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 8
- 238000003754 machining Methods 0.000 claims description 8
- 239000010419 fine particle Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 46
- 238000003672 processing method Methods 0.000 description 25
- 239000013078 crystal Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 19
- 230000003746 surface roughness Effects 0.000 description 14
- 230000006866 deterioration Effects 0.000 description 11
- 239000012535 impurity Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000035699 permeability Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229910018605 Ni—Zn Inorganic materials 0.000 description 3
- 239000011162 core material Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000012153 distilled water Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 230000005389 magnetism Effects 0.000 description 3
- 229910000702 sendust Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 241001422033 Thestylus Species 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11958578A JPS5544787A (en) | 1978-09-27 | 1978-09-27 | Grinding method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11958578A JPS5544787A (en) | 1978-09-27 | 1978-09-27 | Grinding method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5544787A JPS5544787A (en) | 1980-03-29 |
| JPS6113950B2 true JPS6113950B2 (enrdf_load_stackoverflow) | 1986-04-16 |
Family
ID=14764998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11958578A Granted JPS5544787A (en) | 1978-09-27 | 1978-09-27 | Grinding method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5544787A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57197884A (en) * | 1981-05-29 | 1982-12-04 | Sony Corp | Composite substrate |
| JPS58186554A (ja) * | 1982-04-20 | 1983-10-31 | Sumitomo Special Metals Co Ltd | Ａｌ↓２Ｏ↓３−ＴｉＣ系材料の精密研摩方法 |
| JPS6171950A (ja) * | 1984-09-14 | 1986-04-12 | Canon Inc | 超音波振動フロ−ト研摩装置 |
| JPS62102455A (ja) * | 1985-10-30 | 1987-05-12 | Sony Corp | 回転ドラムの加工方法 |
-
1978
- 1978-09-27 JP JP11958578A patent/JPS5544787A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5544787A (en) | 1980-03-29 |
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