JPS61137381A - 無声放電式ガスレ−ザ装置 - Google Patents

無声放電式ガスレ−ザ装置

Info

Publication number
JPS61137381A
JPS61137381A JP26015384A JP26015384A JPS61137381A JP S61137381 A JPS61137381 A JP S61137381A JP 26015384 A JP26015384 A JP 26015384A JP 26015384 A JP26015384 A JP 26015384A JP S61137381 A JPS61137381 A JP S61137381A
Authority
JP
Japan
Prior art keywords
metal electrode
coolant
silent discharge
laser device
gas laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26015384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS641949B2 (enExample
Inventor
Satoru Hayashi
悟 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26015384A priority Critical patent/JPS61137381A/ja
Publication of JPS61137381A publication Critical patent/JPS61137381A/ja
Publication of JPS641949B2 publication Critical patent/JPS641949B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP26015384A 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置 Granted JPS61137381A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26015384A JPS61137381A (ja) 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26015384A JPS61137381A (ja) 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置

Publications (2)

Publication Number Publication Date
JPS61137381A true JPS61137381A (ja) 1986-06-25
JPS641949B2 JPS641949B2 (enExample) 1989-01-13

Family

ID=17344045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26015384A Granted JPS61137381A (ja) 1984-12-10 1984-12-10 無声放電式ガスレ−ザ装置

Country Status (1)

Country Link
JP (1) JPS61137381A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204678A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ管
JPS63204677A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ用電極
JPS63204680A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ用送風機フイン
JPS63204681A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ用熱交換器フイン

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204678A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ管
JPS63204677A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ用電極
JPS63204680A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ用送風機フイン
JPS63204681A (ja) * 1987-02-20 1988-08-24 Toshiba Corp エキシマレ−ザ用熱交換器フイン

Also Published As

Publication number Publication date
JPS641949B2 (enExample) 1989-01-13

Similar Documents

Publication Publication Date Title
JPS61137381A (ja) 無声放電式ガスレ−ザ装置
JPS603170A (ja) 無声放電式ガスレ−ザ装置
JPS6026310B2 (ja) ガスレ−ザ装置
JPS61280689A (ja) ガスレ−ザ装置
JPS6310916B2 (enExample)
JPS6245717B2 (enExample)
JPS6398171A (ja) 高周波放電励起レ−ザ装置
JPS6239555B2 (enExample)
JPS6263482A (ja) ガスレ−ザ装置
JPS6239083A (ja) ガスレ−ザ装置
JPS6017975A (ja) 無声放電式ガスレ−ザ装置
JPS6324686A (ja) ガスレ−ザ装置
JPS63117477A (ja) ガスレ−ザ装置
JP2003264328A (ja) 導波路型ガスレーザ発振器
JPS62242376A (ja) ガスレ−ザ装置
US6185234B1 (en) Laser oscillation device
Muuss et al. High-power argon-ion laser with titanium covered beryllia discharge tube
JPS6346995B2 (enExample)
JPH01273375A (ja) 放電励起エキシマレーザ装置
JPS6225478A (ja) レ−ザ発振器
JPH05327071A (ja) レーザ装置の冷却器
JPS6026311B2 (ja) ガスレ−ザ装置
JPS61219191A (ja) レーザーガス中の放電を励起する装置
JPS5849644Y2 (ja) 導波型ガスレ−ザ管
JPS6035836B2 (ja) ガスレ−ザ装置