JPS61133560U - - Google Patents

Info

Publication number
JPS61133560U
JPS61133560U JP1523285U JP1523285U JPS61133560U JP S61133560 U JPS61133560 U JP S61133560U JP 1523285 U JP1523285 U JP 1523285U JP 1523285 U JP1523285 U JP 1523285U JP S61133560 U JPS61133560 U JP S61133560U
Authority
JP
Japan
Prior art keywords
electrode
sputter target
vacuum container
substrate
target electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1523285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342037Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1523285U priority Critical patent/JPH0342037Y2/ja
Publication of JPS61133560U publication Critical patent/JPS61133560U/ja
Application granted granted Critical
Publication of JPH0342037Y2 publication Critical patent/JPH0342037Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1523285U 1985-02-04 1985-02-04 Expired JPH0342037Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1523285U JPH0342037Y2 (enrdf_load_stackoverflow) 1985-02-04 1985-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1523285U JPH0342037Y2 (enrdf_load_stackoverflow) 1985-02-04 1985-02-04

Publications (2)

Publication Number Publication Date
JPS61133560U true JPS61133560U (enrdf_load_stackoverflow) 1986-08-20
JPH0342037Y2 JPH0342037Y2 (enrdf_load_stackoverflow) 1991-09-03

Family

ID=30500891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1523285U Expired JPH0342037Y2 (enrdf_load_stackoverflow) 1985-02-04 1985-02-04

Country Status (1)

Country Link
JP (1) JPH0342037Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7229715B2 (en) 2003-06-17 2007-06-12 The Gillette Company Anode for battery
US7247407B2 (en) 1997-08-01 2007-07-24 The Gillette Company Electrode having modal distribution of zinc-based particles
JP5651693B2 (ja) * 2010-06-23 2015-01-14 株式会社アルバック 基板ホルダ及び成膜装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7247407B2 (en) 1997-08-01 2007-07-24 The Gillette Company Electrode having modal distribution of zinc-based particles
US7579113B2 (en) 1997-08-01 2009-08-25 The Gillette Company Electrode having modal distribution of zinc-based particles
US7229715B2 (en) 2003-06-17 2007-06-12 The Gillette Company Anode for battery
JP5651693B2 (ja) * 2010-06-23 2015-01-14 株式会社アルバック 基板ホルダ及び成膜装置

Also Published As

Publication number Publication date
JPH0342037Y2 (enrdf_load_stackoverflow) 1991-09-03

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