JPS6236065U - - Google Patents

Info

Publication number
JPS6236065U
JPS6236065U JP12085885U JP12085885U JPS6236065U JP S6236065 U JPS6236065 U JP S6236065U JP 12085885 U JP12085885 U JP 12085885U JP 12085885 U JP12085885 U JP 12085885U JP S6236065 U JPS6236065 U JP S6236065U
Authority
JP
Japan
Prior art keywords
side electrode
target side
vacuum chamber
covered
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12085885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12085885U priority Critical patent/JPS6236065U/ja
Publication of JPS6236065U publication Critical patent/JPS6236065U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12085885U 1985-08-08 1985-08-08 Pending JPS6236065U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12085885U JPS6236065U (enrdf_load_stackoverflow) 1985-08-08 1985-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12085885U JPS6236065U (enrdf_load_stackoverflow) 1985-08-08 1985-08-08

Publications (1)

Publication Number Publication Date
JPS6236065U true JPS6236065U (enrdf_load_stackoverflow) 1987-03-03

Family

ID=31009572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12085885U Pending JPS6236065U (enrdf_load_stackoverflow) 1985-08-08 1985-08-08

Country Status (1)

Country Link
JP (1) JPS6236065U (enrdf_load_stackoverflow)

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