JPS61131827U - - Google Patents
Info
- Publication number
- JPS61131827U JPS61131827U JP1467985U JP1467985U JPS61131827U JP S61131827 U JPS61131827 U JP S61131827U JP 1467985 U JP1467985 U JP 1467985U JP 1467985 U JP1467985 U JP 1467985U JP S61131827 U JPS61131827 U JP S61131827U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- susceptor
- bell gear
- ultraviolet rays
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 1
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1467985U JPS61131827U (https=) | 1985-02-06 | 1985-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1467985U JPS61131827U (https=) | 1985-02-06 | 1985-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61131827U true JPS61131827U (https=) | 1986-08-18 |
Family
ID=30499821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1467985U Pending JPS61131827U (https=) | 1985-02-06 | 1985-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61131827U (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58158914A (ja) * | 1982-03-16 | 1983-09-21 | Semiconductor Res Found | 半導体製造装置 |
-
1985
- 1985-02-06 JP JP1467985U patent/JPS61131827U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58158914A (ja) * | 1982-03-16 | 1983-09-21 | Semiconductor Res Found | 半導体製造装置 |
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