JPS61130832A - 輝度分布測定装置 - Google Patents

輝度分布測定装置

Info

Publication number
JPS61130832A
JPS61130832A JP25311084A JP25311084A JPS61130832A JP S61130832 A JPS61130832 A JP S61130832A JP 25311084 A JP25311084 A JP 25311084A JP 25311084 A JP25311084 A JP 25311084A JP S61130832 A JPS61130832 A JP S61130832A
Authority
JP
Japan
Prior art keywords
detector
light
image
brightness distribution
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25311084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582534B2 (enrdf_load_stackoverflow
Inventor
Atsuko Momota
百田　あつ子
Shigeru Horii
滋 堀井
Hideo Nishiyama
西山　英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP25311084A priority Critical patent/JPS61130832A/ja
Publication of JPS61130832A publication Critical patent/JPS61130832A/ja
Publication of JPH0582534B2 publication Critical patent/JPH0582534B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP25311084A 1984-11-30 1984-11-30 輝度分布測定装置 Granted JPS61130832A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25311084A JPS61130832A (ja) 1984-11-30 1984-11-30 輝度分布測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25311084A JPS61130832A (ja) 1984-11-30 1984-11-30 輝度分布測定装置

Publications (2)

Publication Number Publication Date
JPS61130832A true JPS61130832A (ja) 1986-06-18
JPH0582534B2 JPH0582534B2 (enrdf_load_stackoverflow) 1993-11-19

Family

ID=17246634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25311084A Granted JPS61130832A (ja) 1984-11-30 1984-11-30 輝度分布測定装置

Country Status (1)

Country Link
JP (1) JPS61130832A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0582534B2 (enrdf_load_stackoverflow) 1993-11-19

Similar Documents

Publication Publication Date Title
JP5337292B2 (ja) 光源の変動を測定するためのシステムを備えたｅｕｖ照明システム
JP5486692B2 (ja) 積分球光度計およびその測定方法
US8520198B2 (en) Goniophotometer for measuring 3D light intensity distribution of light source
CN102087483B (zh) 一种用于投影光刻中焦面检测的光学系统
JPS63261144A (ja) 光学的ウエブモニター装置
KR101522573B1 (ko) 안과장치
US9194810B2 (en) Method and device for the detection of surface defects of a component
TW378268B (en) Illuminator for inspecting substantially flat surfaces
JP2008139277A (ja) 凹面リフレクタの検査装置及び検査方法、並びに光源装置の製造方法
JPS61130832A (ja) 輝度分布測定装置
JPH0694515A (ja) 光発散特性測定装置
JP3322606B2 (ja) 板幅・蛇行検出方法及び装置
JP3997761B2 (ja) 照明光学装置およびそれを備えた検査装置
US4154532A (en) High precision optical alignment system
CN115452323A (zh) 一种测试相机系统内方位元素的系统及方法
JP2005331302A (ja) 外側面検査方法及び外側面検査装置
CN112747738A (zh) 平行度监测星点切换离轴两反自准直单星模拟器
JP2518171B2 (ja) 照明用フアイバ−束検査装置
JPH04260108A (ja) 光学センサー
JP2002323404A (ja) 表面検査装置
SU487364A1 (ru) Фотоэлектрический датчик
SU728060A1 (ru) Фотоэлектрический дефектоскоп дл контрол поверхностей тел вращени
JPH0312524A (ja) 発光強度分布の映像化方法
JPH07333157A (ja) 球体表面検査装置
JPS6333627A (ja) カラ−センサの投光用光学系