JPS6113072A - アクチユエ−タ - Google Patents

アクチユエ−タ

Info

Publication number
JPS6113072A
JPS6113072A JP59134697A JP13469784A JPS6113072A JP S6113072 A JPS6113072 A JP S6113072A JP 59134697 A JP59134697 A JP 59134697A JP 13469784 A JP13469784 A JP 13469784A JP S6113072 A JPS6113072 A JP S6113072A
Authority
JP
Japan
Prior art keywords
displacement
piezoelectric element
vertical
horizontal
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59134697A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520633B2 (enrdf_load_stackoverflow
Inventor
Shigekazu Nagai
茂和 永井
Tetsuo Kukuminato
久々湊 哲夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Shoketsu Kinzoku Kogyo KK
Original Assignee
Shoketsu Kinzoku Kogyo Co Ltd
Shoketsu Kinzoku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shoketsu Kinzoku Kogyo Co Ltd, Shoketsu Kinzoku Kogyo KK filed Critical Shoketsu Kinzoku Kogyo Co Ltd
Priority to JP59134697A priority Critical patent/JPS6113072A/ja
Publication of JPS6113072A publication Critical patent/JPS6113072A/ja
Publication of JPH0520633B2 publication Critical patent/JPH0520633B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59134697A 1984-06-28 1984-06-28 アクチユエ−タ Granted JPS6113072A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59134697A JPS6113072A (ja) 1984-06-28 1984-06-28 アクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59134697A JPS6113072A (ja) 1984-06-28 1984-06-28 アクチユエ−タ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3073327A Division JPH0693212B2 (ja) 1991-04-05 1991-04-05 アクチュエータの駆動方法

Publications (2)

Publication Number Publication Date
JPS6113072A true JPS6113072A (ja) 1986-01-21
JPH0520633B2 JPH0520633B2 (enrdf_load_stackoverflow) 1993-03-22

Family

ID=15134477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59134697A Granted JPS6113072A (ja) 1984-06-28 1984-06-28 アクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS6113072A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6391712A (ja) * 1986-10-06 1988-04-22 Canon Inc 2次元駆動装置
JPS6391713A (ja) * 1986-10-06 1988-04-22 Canon Inc 超音波型駆動装置
JPH0250208A (ja) * 1988-08-11 1990-02-20 Olympus Optical Co Ltd 載置体移動アクチュエータ
JPH0368253U (enrdf_load_stackoverflow) * 1989-11-02 1991-07-04
JPH03119134U (enrdf_load_stackoverflow) * 1990-03-19 1991-12-09
JP2009275884A (ja) * 2008-05-16 2009-11-26 Toyota Industries Corp 切替弁

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197882A (en) * 1982-05-26 1982-12-04 Hitachi Ltd Piezoelectric oscillator
JPS5866380A (ja) * 1981-10-15 1983-04-20 Matsushita Electric Ind Co Ltd 電歪基板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866380A (ja) * 1981-10-15 1983-04-20 Matsushita Electric Ind Co Ltd 電歪基板
JPS57197882A (en) * 1982-05-26 1982-12-04 Hitachi Ltd Piezoelectric oscillator

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6391712A (ja) * 1986-10-06 1988-04-22 Canon Inc 2次元駆動装置
JPS6391713A (ja) * 1986-10-06 1988-04-22 Canon Inc 超音波型駆動装置
JPH0250208A (ja) * 1988-08-11 1990-02-20 Olympus Optical Co Ltd 載置体移動アクチュエータ
JPH0368253U (enrdf_load_stackoverflow) * 1989-11-02 1991-07-04
JPH03119134U (enrdf_load_stackoverflow) * 1990-03-19 1991-12-09
JP2009275884A (ja) * 2008-05-16 2009-11-26 Toyota Industries Corp 切替弁

Also Published As

Publication number Publication date
JPH0520633B2 (enrdf_load_stackoverflow) 1993-03-22

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